Determination of Pore-Size Distributions in Low-k Dielectric Films by Transmission Electron Microscopy

The nanocrystals Ce0.5Zr0.5O2 solid solutions with various morphologies and crystal structures have been synthesized via a modified sol-gel method assisted with a template. Aerosol OT and/or ionic liquids ([MMIM]Cl] and [BMIM]Cl]) was used as a template. The characterization results of the X-ray diffraction, transmission electron microscopy and N2 adsorption at 77 K indicate that the physical properties of the solid solutions were significantly affected by the templates used and the calcination temperatures. The Ce0.5Zr0.5O2 calcined at 773 K possessed bimodal mesopores, narrow pore size distributions, and tetragonal phase.

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Size-broadening anisotropy in whole powder pattern fitting. Application to zinc oxide and interpretation of the apparent crystallites in terms of physical models

Journal of Applied Crystallography ◽

10.1107/s0021889808012223 ◽

2008 ◽

Vol 41 (3) ◽

pp. 615-627 ◽

Cited By ~ 50

Author(s):

N. C. Popa ◽

D. Balzar

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

A Priori ◽

Physical Models ◽

Powder Pattern ◽

Size Distributions ◽

Complementary Information ◽

Transmission Electron ◽

Zno Powder

A new anisotropic size-broadening model based on a spherical-harmonics representation allowing determination of both volume- and area-averaged apparent crystallites and convenient for implementation into Rietveld programs is described. The model effectiveness is demonstrated on a ZnO powder pattern exhibiting strongly anisotropic size broadening and pronounced super-Lorentzian peak shapes. Moreover, it is shown how the apparent crystallites can be interpreted in terms of physical models by using ellipsoidal and cylindrical crystallites with lognormal size distributions. This interpretation is critically assessed and it is argued that both simplified physical models anda prioricomplementary information (obtained by transmission electron microscopy, for instance) are often needed to avoid unstable and non-unique solutions.

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Determination of pore size distribution by transmission electron microscopy

Journal of Catalysis ◽

10.1016/0021-9517(76)90238-4 ◽

1976 ◽

Vol 41 (3) ◽

pp. 373-383 ◽

Cited By ~ 4

Author(s):

Y CHU

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Pore Size Distribution ◽

Pore Size ◽

Size Distribution ◽

Transmission Electron

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An Overview of Cu Wire Intermetallic Compound Formation and a Corrosion Failure Mechanism

ISTFA 2012: Conference Proceedings from the 38th International Symposium for Testing and Failure Analysis ◽

10.31399/asm.cp.istfa2012p0310 ◽

2012 ◽

Author(s):

Dongmei Meng ◽

Laura Buck ◽

James Cargo

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Corrosion Mechanism ◽

Fundamental Study ◽

Corrosion Failure ◽

Transmission Electron ◽

Intermetallic Compound Formation ◽

Scanning Transmission ◽

Low K

Abstract Cu needs a higher level of ultrasound combined with bonding force to be bonded to the Al pad properly, not just because Cu is harder than Au, but it is also harder to initiate intermetallic compounds (IMC) formation during bonding. This increases the chances of damaging the metal/low k stack under the bondpad. This paper presents a fundamental study of IMC as well as one example of a failure mode of Cu/Al bonded devices, all based on detailed analysis using scanning electron microscopy, scanning transmission electron microscopy, energy dispersive spectrometers, and transmission electron microscopy. It presents a case study showing a corrosion mechanism of Cu/Al ballbond after 168hr UHAST stress. It is observed that all Cu9Al4 was consumed, while very little copper aluminide remained after 168 hours of UHAST stressing.

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