Characteristics of electron cyclotron resonance plasma generated in a rectangular waveguide by high-power microwave

2004 ◽  
Vol 75 (1) ◽  
pp. 84-89 ◽  
Author(s):  
Lekha Nath Mishra ◽  
Kanetoshi Shibata ◽  
Hiroaki Ito ◽  
Noboru Yugami ◽  
Yasushi Nishida
Keyword(s):  
High Power ◽  
Rectangular Waveguide ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
High Power Microwave ◽  
Power Microwave ◽  
Resonance Plasma

Soft X-rays generated by the electron-cyclotron resonance discharge in heavy gases sustained by a high-power microwave beam in a magnetic trap

2000 ◽  
Vol 26 (12) ◽  
pp. 1075-1077 ◽  
Author(s):  
A. V. Vodopyanov ◽  
S. V. Golubev ◽  
V. G. Zorin ◽  
A. Yu. Kryachko ◽  
A. Ya. Lopatin ◽  
...  
Keyword(s):  
High Power ◽  
Cyclotron Resonance ◽  
Magnetic Trap ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
X Rays ◽  
High Power Microwave ◽  
Microwave Beam ◽  
Power Microwave

Reduction of Charge Build-up with High-Power Pulsed Electron Cyclotron Resonance Plasma

1997 ◽  
Vol 36 (Part 1, No. 4B) ◽  
pp. 2526-2532 ◽  
Author(s):  
Takahiro Maruyama ◽  
Nobuo Fujiwara ◽  
Satoshi Ogino ◽  
Masahiro Yoneda
Keyword(s):  
High Power ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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