Thermal stability of plasma-nitrided aluminum oxide films on Si
1989 ◽
Vol 136
(6)
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pp. 1740-1743
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2011 ◽
Vol 47
(2)
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pp. 739-745
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2010 ◽
Vol 56
(4)
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pp. 1176-1179
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2007 ◽
Vol 457
(1-2)
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pp. 77-83
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Keyword(s):
2013 ◽
Vol 10
(11)
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pp. 1592-1595
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Keyword(s):
2016 ◽
Vol 18
(15)
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pp. 10419-10427
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Keyword(s):
1986 ◽
Vol 25
(Part 1, No. 12)
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pp. 1862-1864
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Keyword(s):
2006 ◽
Vol 21
(2)
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pp. 455-464
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