Diffuse x-ray scattering and transmission electron microscopy study of defects in antimony-implanted silicon
2010 ◽
Vol 247
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pp. 012017
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2015 ◽
Vol 119
(19)
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pp. 10653-10661
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2001 ◽
Vol 19
(5)
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pp. 2207-2216
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1972 ◽
2004 ◽
Vol 34
(3)
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pp. 345-348
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