Diffuse x-ray scattering and transmission electron microscopy study of defects in antimony-implanted silicon

2004 ◽  
Vol 95 (8) ◽  
pp. 3968-3976 ◽  
Author(s):  
Y. Takamura ◽  
A. F. Marshall ◽  
A. Mehta ◽  
J. Arthur ◽  
P. B. Griffin ◽  
...  
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