Determination of Film Thickness or Ion Etch Rate Using Auger Electron Spectroscopy

Review of Scientific Instruments ◽

10.1063/1.1685626 ◽

1972 ◽

Vol 43 (2) ◽

pp. 335-337 ◽

Author(s):

R. N. Yasko ◽

L. J. Fried

Keyword(s):

Film Thickness ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Etch Rate ◽

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Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser

10.3403/30124424 ◽

2005 ◽

Keyword(s):

Chemical Analysis ◽

Auger Electron Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Chemical ◽

X Ray ◽

Resolution Analysis ◽

Surface Chemical Analysis

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Determination of the depth resolution of Auger electron spectroscopy depth profiles of anodic barrier oxide films on differently pretreated aluminium substrates

Surface and Interface Analysis ◽

10.1002/sia.740220139 ◽

1994 ◽

Vol 22 (1-12) ◽

pp. 175-180 ◽

Author(s):

J. De Laet ◽

K. De Boeck ◽

H. Terryn ◽

J. Vereecken

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxide Films ◽

Depth Resolution ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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Determination of the Low Temperature Diffusion of Chromium Through Gold Films by Ion Scattering Spectroscopy and Auger Electron Spectroscopy

Surface Analysis Techniques for Metallurgical Applications ◽

10.1520/stp39062s ◽

2009 ◽

pp. 68-68-11 ◽

Author(s):

GC Nelson ◽

PH Holloway

Keyword(s):

Low Temperature ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Ion Scattering ◽

Temperature Diffusion ◽

Ion Scattering Spectroscopy

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Determination of the grain boundary diffusion coefficient from Ag surface coverage in thin Au-Ag film by auger electron spectroscopy

Applied Physics A Solids and Surface ◽

10.1007/bf00616918 ◽

1984 ◽

Vol 34 (3) ◽

pp. 193-194 ◽

Author(s):

A. Bukaluk ◽

M. Rozwadowski ◽

R. Siuda

Keyword(s):

Diffusion Coefficient ◽

Grain Boundary ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Coverage ◽

Boundary Diffusion ◽

Boundary Diffusion Coefficient ◽

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Quantitative determination of atomic concentrations by Auger electron spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575487 ◽

1988 ◽

Vol 6 (6) ◽

pp. 3130-3133 ◽

Author(s):

Y. Goldstein ◽

A. Many ◽

O. Millo ◽

S. Z. Weisz ◽

O. Resto

Keyword(s):

Quantitative Determination ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

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Determination of the Grain Boundary Diffusion Coefficients in Thin Film Au-Ag Couples by Auger Electron Spectroscopy

Physics of Solid Surfaces 1984 - Studies in Surface Science and Catalysis ◽

10.1016/s0167-2991(08)65122-8 ◽

1985 ◽

pp. 170-171 ◽

Author(s):

Antoni Bukaluk

Keyword(s):

Thin Film ◽

Grain Boundary ◽

Auger Electron Spectroscopy ◽

Diffusion Coefficients ◽

Electron Spectroscopy ◽

Auger Electron ◽

Boundary Diffusion ◽

Grain Boundary Diffusion

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On the determination of surface composition in auger electron spectroscopy

Surface Science ◽

10.1016/0039-6028(88)90049-0 ◽

1988 ◽

Vol 202 (3) ◽

pp. 493-508 ◽

Author(s):

Pavel Lejček

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Surface Composition

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Determination of Changes in Workfunction of Carbon Nanotubes by Auger Electron Spectroscopy after Deposition of thin Hafnium Oxide by ALD

Nano- i Mikrosistemnaya Tehnika ◽

10.17587/nmst.21.465-471 ◽

2019 ◽

Vol 21 (8) ◽

pp. 465-471

Author(s):

V.S. Belov ◽

◽

K.I. Litvinova ◽

A.M. Tagachenkov ◽

A.P. Sirotina ◽

...

Keyword(s):

Carbon Nanotubes ◽

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Hafnium Oxide ◽

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Introduction of a calibration line for composition determination of a binary alloy by Auger electron spectroscopy (quantitative formalism)

Vacuum ◽

10.1016/s0042-207x(80)81087-6 ◽

1980 ◽

Vol 30 (1) ◽

pp. 42

Keyword(s):

Auger Electron Spectroscopy ◽

Binary Alloy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Calibration Line ◽

Composition Determination

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Auger electron spectroscopy determination of surface self-diffusion coefficients from growth of voids in thin deposited films

Applied Surface Science ◽

10.1016/s0169-4332(03)00109-0 ◽

2003 ◽

Vol 212-213 ◽

pp. 787-791 ◽

Author(s):

I. Beszeda ◽

I.A. Szabó ◽

E.G. Gontier-Moya

Keyword(s):

Auger Electron Spectroscopy ◽

Diffusion Coefficients ◽

Electron Spectroscopy ◽

Auger Electron ◽

Self Diffusion ◽

Growth Of Voids ◽

Deposited Films

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