Two-dimensional X-ray diffraction and transmission electron microscopy study on the effect of magnetron sputtering atmosphere on GaN/SiC interface and gallium nitride thin film crystal structure

2015 ◽  
Vol 117 (11) ◽  
pp. 115301 ◽  
Author(s):  
Huaxiang Shen ◽  
Guo-Zhen Zhu ◽  
Gianluigi A. Botton ◽  
Adrian Kitai
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