The impact of frequency mixing on sheath properties: Ion energy distribution and Vdc∕Vrf interaction
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2008 ◽
Vol 47
(8)
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pp. 6900-6902
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1992 ◽
Vol 25
(4)
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pp. 620-633
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2014 ◽
Vol 42
(7)
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pp. 1880-1893
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2017 ◽
Vol 50
(13)
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pp. 135203
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