Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes

2006 ◽  
Vol 77 (4) ◽  
pp. 043103 ◽  
Author(s):  
T. Luo ◽  
A. Khursheed
Author(s):  
C. Colliex ◽  
P. Trebbia

The physical foundations for the use of electron energy loss spectroscopy towards analytical purposes, seem now rather well established and have been extensively discussed through recent publications. In this brief review we intend only to mention most recent developments in this field, which became available to our knowledge. We derive also some lines of discussion to define more clearly the limits of this analytical technique in materials science problems.The spectral information carried in both low ( 0<ΔE<100eV ) and high ( >100eV ) energy regions of the loss spectrum, is capable to provide quantitative results. Spectrometers have therefore been designed to work with all kinds of electron microscopes and to cover large energy ranges for the detection of inelastically scattered electrons (for instance the L-edge of molybdenum at 2500eV has been measured by van Zuylen with primary electrons of 80 kV). It is rather easy to fix a post-specimen magnetic optics on a STEM, but Crewe has recently underlined that great care should be devoted to optimize the collecting power and the energy resolution of the whole system.


2012 ◽  
Vol 18 (4) ◽  
pp. 667-675 ◽  
Author(s):  
Paul Cueva ◽  
Robert Hovden ◽  
Julia A. Mundy ◽  
Huolin L. Xin ◽  
David A. Muller

AbstractThe high beam current and subangstrom resolution of aberration-corrected scanning transmission electron microscopes has enabled electron energy loss spectroscopy (EELS) mapping with atomic resolution. These spectral maps are often dose limited and spatially oversampled, leading to low counts/channel and are thus highly sensitive to errors in background estimation. However, by taking advantage of redundancy in the dataset map, one can improve background estimation and increase chemical sensitivity. We consider two such approaches—linear combination of power laws and local background averaging—that reduce background error and improve signal extraction. Principal component analysis (PCA) can also be used to analyze spectrum images, but the poor peak-to-background ratio in EELS can lead to serious artifacts if raw EELS data are PCA filtered. We identify common artifacts and discuss alternative approaches. These algorithms are implemented within the Cornell Spectrum Imager, an open source software package for spectroscopic analysis.


Author(s):  
P.A. Crozier ◽  
M. Gajdardziska-Josifovska ◽  
J.M. Cowley

The technique of reflection electron energy-loss spectroscopy (REELS) can be used to perform elemental analysis of surfaces in an electron microscope. The information obtained from this technique can be combined with topographic information from reflection imaging and with crystallographic information from the RHEED pattern. We have applied these techniques to study the (100) surface of MgO subject to high temperature annealing. By utilizing small probes available in modern analytical electron microscopes we have been able to measure differences in the surface compositions of small topographic features and we show for the first time that the Ca distribution on the surface is not uniform.


2009 ◽  
Vol 15 (S2) ◽  
pp. 1484-1485 ◽  
Author(s):  
Y Abe ◽  
T Tanaka ◽  
H Sawada ◽  
E Okunishi ◽  
Y Kondo ◽  
...  

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009


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