High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering

2006 ◽  
Vol 89 (11) ◽  
pp. 112123 ◽  
Author(s):  
Hisato Yabuta ◽  
Masafumi Sano ◽  
Katsumi Abe ◽  
Toshiaki Aiba ◽  
Tohru Den ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Thin Film Transistor ◽  
High Mobility ◽  
Rf Magnetron Sputtering

High performance thin film transistor with HfSiO x dielectric fabricated at room temperature RF-magnetron sputtering

2013 ◽  
Vol 9 (4) ◽  
pp. 381-384 ◽  
Author(s):  
Dongkyu Cho ◽  
Sanghyun Woo ◽  
Jungil Yang ◽  
Donghee Lee ◽  
Yoosung Lim ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
High Performance ◽  
Room Temperature ◽  
Thin Film Transistor ◽  
Rf Magnetron Sputtering

P-22: Top-Gate Thin Film Transistor with ZnO:N Channel Fabricated by Room Temperature RF Magnetron Sputtering

2014 ◽  
Vol 45 (1) ◽  
pp. 1024-1027 ◽  
Author(s):  
Meng Zhang ◽  
Wei Zhou ◽  
Rongsheng Chen ◽  
Man Wong ◽  
Hoi-Sing Kwok
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Thin Film Transistor ◽  
Rf Magnetron Sputtering

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

2003 ◽  
Vol 82 (7) ◽  
pp. 1117-1119 ◽  
Author(s):  
P. F. Carcia ◽  
R. S. McLean ◽  
M. H. Reilly ◽  
G. Nunes
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Thin Film Transistor ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Film

scholarly journals High-mobility ZrInO thin-film transistor prepared by an all-DC-sputtering method at room temperature

2016 ◽  
Vol 6 (1) ◽  
Author(s):  
Peng Xiao ◽  
Ting Dong ◽  
Linfeng Lan ◽  
Zhenguo Lin ◽  
Wei Song ◽  
...  
Keyword(s):  
Thin Film ◽  
Room Temperature ◽  
Thin Film Transistor ◽  
High Mobility ◽  
Dc Sputtering

High Mobility Field-Effect Thin Film Transistor Using Room-Temperature High-$\kappa$ Gate Dielectrics

2014 ◽  
Vol 10 (10) ◽  
pp. 875-881 ◽  
Author(s):  
Hsiao-Hsuan Hsu ◽  
Chun-Yen Chang ◽  
Chun-Hu Cheng ◽  
Po-Chun Chen ◽  
Yu-Chien Chiu ◽  
...  
Keyword(s):  
Thin Film ◽  
Field Effect ◽  
Room Temperature ◽  
Gate Dielectrics ◽  
Thin Film Transistor ◽  
High Mobility

Room-temperature flexible thin film transistor with high mobility

2013 ◽  
Vol 13 (7) ◽  
pp. 1459-1462 ◽  
Author(s):  
Hsiao-Hsuan Hsu ◽  
Chun-Yen Chang ◽  
Chun-Hu Cheng
Keyword(s):  
Thin Film ◽  
Room Temperature ◽  
Thin Film Transistor ◽  
High Mobility

Preparation of ZnO:Al thin film on transparent TPT substrate at room temperature by RF magnetron sputtering technique

2009 ◽  
Vol 63 (16) ◽  
pp. 1371-1373 ◽  
Author(s):  
Xiao-jing Wang ◽  
Qing-song Lei ◽  
Wei Xu ◽  
Wei-li Zhou ◽  
Jun Yu
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Rf Magnetron Sputtering
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