scholarly journals Effect of Halogen on the Structure of Low Temperature Polycrystalline Silicon Thin Films Fabricated on Glass Substrates.

1999 ◽  
Vol 107 (1251) ◽  
pp. 1099-1104 ◽  
Author(s):  
Toshio KAMIYA ◽  
Yoshiteru MAEDA ◽  
Kouichi NAKAHATA ◽  
Takashi KOMARU ◽  
Charles M. FORTMANN ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Glass Substrates ◽  
Silicon Thin Films

Enhanced hydrogenation in polycrystalline silicon thin films using low‐temperature ultrasound treatment

1996 ◽  
Vol 68 (20) ◽  
pp. 2873-2875 ◽  
Author(s):  
S. Ostapenko ◽  
L. Jastrzebski ◽  
J. Lagowski ◽  
R. K. Smeltzer
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Ultrasound Treatment ◽  
Silicon Thin Films

One-step growth of polycrystalline silicon thin films at low-temperature by ArF excimer laser-induced photo-CVD

1992 ◽  
Vol 54 ◽  
pp. 35-40 ◽  
Author(s):  
M. Elliq ◽  
E. Fogarassy ◽  
C. Fuchs ◽  
J.P. Stoquert ◽  
S. de Unamuno ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films ◽  
One Step ◽  
Step Growth ◽  
Arf Excimer Laser
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