Tribological and optical properties of crystalline and amorphous alumina thin films grown by low-temperature reactive magnetron sputter-deposition

Amorphous Alumina ◽

Low temperature magnetron sputter deposition of polycrystalline silicon thin films using high flux ion bombardment

Journal of Applied Physics ◽

10.1063/1.2710301 ◽

2007 ◽

Vol 101 (6) ◽

pp. 063508 ◽

Cited By ~ 7

Author(s):

Jennifer E. Gerbi ◽

John R. Abelson

Keyword(s):

Thin Films ◽

Low Temperature ◽

Polycrystalline Silicon ◽

Ion Bombardment ◽

Sputter Deposition ◽

High Flux ◽

Silicon Thin Films ◽

Ion-assisted low-temperature (≤ 150 °C) epitaxial growth of TiN on Cu by reactive magnetron sputter deposition

Thin Solid Films ◽

10.1016/s0040-6090(96)08741-x ◽

1996 ◽

Vol 287 (1-2) ◽

pp. 87-92 ◽

Cited By ~ 3

Author(s):

H. Ljungcrantz ◽

S. Benhenda ◽

G. Håkansson ◽

I. Ivanov ◽

L. Hultman ◽

...

Keyword(s):

Low Temperature ◽

Epitaxial Growth ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Macrocrystalline silicon thin films prepared by RF reactive magnetron sputter deposition

Vacuum ◽

10.1016/0042-207x(95)00158-1 ◽

1995 ◽

Vol 46 (12) ◽

pp. 1385-1390 ◽

Cited By ~ 26

Author(s):

MF Cerqueira ◽

M Andritschky ◽

L Rebouta ◽

JA Ferreira ◽

MF da Silva

Keyword(s):

Thin Films ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Silicon Thin Films ◽

Fully strained low-temperature epitaxy of TiN/MgO(001) layers using high-flux, low-energy ion irradiation during reactive magnetron sputter deposition

Thin Solid Films ◽

10.1016/j.tsf.2010.04.028 ◽

2010 ◽

Vol 518 (18) ◽

pp. 5169-5172 ◽

Cited By ~ 13

Author(s):

Taeyoon Lee ◽

H. Seo ◽

H. Hwang ◽

B. Howe ◽

S. Kodambaka ◽

...

Keyword(s):

Low Temperature ◽

Ion Irradiation ◽

Sputter Deposition ◽

Low Energy ◽

High Flux ◽

Reactive Magnetron ◽

Magnetron Sputter ◽

Low Temperature Epitaxy

Reactive magnetron sputter deposition of (Ti,Cu)N nano-crystalline thin films: modeling of particle and energy flux toward the substrate

Physica Scripta ◽

10.1088/0031-8949/86/02/025301 ◽

2012 ◽

Vol 86 (2) ◽

pp. 025301 ◽

Cited By ~ 4

Author(s):

A Rahmati

Keyword(s):

Thin Films ◽

Energy Flux ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Nano Crystalline ◽

Diagnostics of dual source reactive magnetron sputter deposition of aluminum nitride and zirconium nitride thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577750 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1804-1808 ◽

Cited By ~ 7

Author(s):

Jeffrey A. Sell ◽

W. J. Meng ◽

Thomas A. Perry

Keyword(s):

Thin Films ◽

Aluminum Nitride ◽

Sputter Deposition ◽

Zirconium Nitride ◽

Reactive Magnetron ◽

Dual Source ◽

Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Thin Solid Films ◽

10.1016/j.tsf.2019.137685 ◽

2020 ◽

Vol 693 ◽

pp. 137685 ◽

Cited By ~ 5

Author(s):

Kristina von Fieandt ◽

Eirini-Maria Paschalidou ◽

Aishwarya Srinath ◽

Pavel Soucek ◽

Lars Riekehr ◽

...

Keyword(s):

Thin Films ◽

Corrosion Resistance ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Reactive Magnetron Sputter Deposition of Superconducting Niobium Titanium Nitride Thin Films With Different Target Sizes

IEEE Transactions on Applied Superconductivity ◽

10.1109/tasc.2016.2631939 ◽

2017 ◽

Vol 27 (4) ◽

pp. 1-5 ◽

Cited By ~ 6

Author(s):

Boy Gustaaf Cornelis Bos ◽

David Johannes Thoen ◽

E. A. F. Haalebos ◽

P. M. L. Gimbel ◽

T. M. Klapwijk ◽

...

Keyword(s):

Thin Films ◽

Titanium Nitride ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Niobium Titanium ◽

Mechanical properties of amorphous carbon nitride thin films prepared by reactive magnetron sputter-deposition

Tribology Letters ◽

10.1007/bf00157978 ◽

1995 ◽

Vol 1 (1) ◽

pp. 87-93 ◽

Cited By ~ 13

Author(s):

Dong Li ◽

Yip-Wah Chung ◽

Ming-Show Wong ◽

William D. Sproul

Keyword(s):

Thin Films ◽

Mechanical Properties ◽

Amorphous Carbon ◽

Carbon Nitride ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Amorphous Carbon Nitride ◽

Influence of substrate bias voltage on structure, mechanical and corrosion properties of ZrO2 thin films deposited by Reactive Magnetron Sputter Deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2020.125821 ◽

2020 ◽

Vol 393 ◽

pp. 125821

Author(s):

Hind Zegtouf ◽

Nadia Saoula ◽

Mourad Azibi ◽

Larbi Bait ◽

Noureddine Madaoui ◽

...

Keyword(s):

Thin Films ◽

Sputter Deposition ◽

Substrate Bias ◽

Reactive Magnetron ◽

Corrosion Properties ◽

Substrate Bias Voltage ◽

Mechanical And Corrosion Properties ◽

Magnetron Sputter ◽

Influence Of Substrate