scholarly journals Macrocrystalline silicon thin films prepared by RF reactive magnetron sputter deposition

Vacuum ◽  
1995 ◽  
Vol 46 (12) ◽  
pp. 1385-1390 ◽  
Author(s):  
MF Cerqueira ◽  
M Andritschky ◽  
L Rebouta ◽  
JA Ferreira ◽  
MF da Silva
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Silicon Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance

2020 ◽  
Vol 693 ◽  
pp. 137685 ◽  
Author(s):  
Kristina von Fieandt ◽  
Eirini-Maria Paschalidou ◽  
Aishwarya Srinath ◽  
Pavel Soucek ◽  
Lars Riekehr ◽  
...  
Keyword(s):  
Thin Films ◽  
Corrosion Resistance ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

scholarly journals Reactive Magnetron Sputter Deposition of Superconducting Niobium Titanium Nitride Thin Films With Different Target Sizes

2017 ◽  
Vol 27 (4) ◽  
pp. 1-5 ◽  
Author(s):  
Boy Gustaaf Cornelis Bos ◽  
David Johannes Thoen ◽  
E. A. F. Haalebos ◽  
P. M. L. Gimbel ◽  
T. M. Klapwijk ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Magnetron Sputter Deposition ◽  
Niobium Titanium ◽  
Magnetron Sputter
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