Next generation of heated atomic force microscope cantilever for nanolithography: modelling, simulation, and nanofabrication

Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019 ◽

10.1117/12.2514686 ◽

2019 ◽

Author(s):

Mohammadreza Soleymaniha ◽

Jonathan R. Felts

Keyword(s):

Atomic Force Microscope ◽

Next Generation ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Modelling Simulation ◽

Force Microscope Cantilever

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Influence of atomic force microscope cantilever tilt and induced torque on force measurements

Journal of Applied Physics ◽

10.1063/1.2885734 ◽

2008 ◽

Vol 103 (6) ◽

pp. 064513 ◽

Author(s):

Scott A. Edwards ◽

William A. Ducker ◽

John E. Sader

Keyword(s):

Atomic Force Microscope ◽

Force Measurements ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures

Applied Physics Letters ◽

10.1063/1.2786881 ◽

2007 ◽

Vol 91 (12) ◽

pp. 121912 ◽

Author(s):

Gaoliang Dai ◽

Helmut Wolff ◽

Hans-Ulrich Danzebrink

Keyword(s):

Atomic Force Microscope ◽

Three Dimensional ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Measuring Probe ◽

Dimensional Measurements ◽

Force Microscope Cantilever

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Improved Nanotopography Sensing via Temperature Control of a Heated Atomic Force Microscope Cantilever

IEEE Sensors Journal ◽

10.1109/jsen.2011.2157121 ◽

2011 ◽

Vol 11 (11) ◽

pp. 2664-2670 ◽

Author(s):

Suhas Somnath ◽

Elise A. Corbin ◽

William P. King

Keyword(s):

Atomic Force Microscope ◽

Temperature Control ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Eigenfrequencies of a rectangular atomic force microscope cantilever in a medium

Journal of Applied Physics ◽

10.1063/1.365379 ◽

1997 ◽

Vol 81 (12) ◽

pp. 7709-7714 ◽

Author(s):

Franz-Josef Elmer ◽

Markus Dreier

Keyword(s):

Atomic Force Microscope ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Dynamic analysis of flexural vibration mode of an atomic force microscope cantilever with a sidewall probe in liquid

Microscopy Research and Technique ◽

10.1002/jemt.23636 ◽

2020 ◽

Author(s):

Amir F. Payam ◽

Nguyen Duy Vy

Keyword(s):

Dynamic Analysis ◽

Atomic Force Microscope ◽

Vibration Mode ◽

Flexural Vibration ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Small mass measurements for tuning fork-based atomic force microscope cantilever spring constant calibration

MEMS and Nanotechnology, Volume 2 - Conference Proceedings of the Society for Experimental Mechanics Series ◽

10.1007/978-1-4419-8825-6_8 ◽

2011 ◽

pp. 49-56 ◽

Author(s):

Gordon A. Shaw ◽

Jon R. Pratt ◽

Zeina J. Jabbour

Keyword(s):

Atomic Force Microscope ◽

Tuning Fork ◽

Spring Constant ◽

Mass Measurements ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Improved methods and uncertainty analysis in the calibration of the spring constant of an atomic force microscope cantilever using static experimental methods

Measurement Science and Technology ◽

10.1088/0957-0233/20/12/125501 ◽

2009 ◽

Vol 20 (12) ◽

pp. 125501 ◽

Author(s):

Charles A Clifford ◽

Martin P Seah

Keyword(s):

Uncertainty Analysis ◽

Atomic Force Microscope ◽

Experimental Methods ◽

Spring Constant ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Improved Methods ◽

Force Microscope Cantilever

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Characterization of the electrical contact between a conductive atomic force microscope cantilever and a carbon nanotube

Journal of Applied Physics ◽

10.1063/1.3626811 ◽

2011 ◽

Vol 110 (5) ◽

pp. 054305 ◽

Author(s):

Tarek K. Ghanem ◽

Ellen D. Williams ◽

Michael S. Fuhrer

Keyword(s):

Carbon Nanotube ◽

Atomic Force Microscope ◽

Electrical Contact ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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Sensitivity Analysis of a Cracked Atomic Force Microscope Cantilever

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.035202 ◽

2012 ◽

Vol 51 (3R) ◽

pp. 035202 ◽

Author(s):

Haw-Long Lee ◽

Win-Jin Chang

Keyword(s):

Sensitivity Analysis ◽

Atomic Force Microscope ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Force Microscope Cantilever

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A more comprehensive modeling of atomic force microscope cantilever

Ultramicroscopy ◽

10.1016/j.ultramic.2008.08.003 ◽

2008 ◽

Vol 109 (1) ◽

pp. 54-60 ◽

Author(s):

M.H. Mahdavi ◽

A. Farshidianfar ◽

M. Tahani ◽

S. Mahdavi ◽

H. Dalir

Keyword(s):

Atomic Force Microscope ◽

Atomic Force Microscope Cantilever ◽

Atomic Force ◽

Comprehensive Modeling ◽

Force Microscope Cantilever

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