Low Temperature Deposition of Silicon Nitride by the Catalytic Chemical Vapor Deposition Method
1989 ◽
Vol 28
(Part 1, No. 10)
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pp. 2157-2161
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1997 ◽
Vol 36
(Part 1, No. 11)
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pp. 7035-7040
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2009 ◽
Vol 311
(15)
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pp. 3938-3942
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2005 ◽
Vol 93
(1)
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pp. 10-15
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1994 ◽
Vol 33
(Part 2, No. 9A)
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pp. L1209-L1211
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1998 ◽
Vol 21
(1-4)
◽
pp. 355-366
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2010 ◽
Vol 256
(12)
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pp. 3906-3911
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2006 ◽
Vol 527-529
◽
pp. 1079-1082
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