Polycrystalline silicon thin films processed with silicon ion implantation and subsequent solid‐phase crystallization: Theory, experiments, and thin‐film transistor applications

Journal of Applied Physics ◽

10.1063/1.356131 ◽

1994 ◽

Vol 75 (7) ◽

pp. 3235-3257 ◽

Author(s):

Noriyoshi Yamauchi ◽

Rafael Reif

Keyword(s):

Thin Film ◽

Ion Implantation ◽

Polycrystalline Silicon ◽

Solid Phase ◽

Thin Film Transistor ◽

Solid Phase Crystallization ◽

Silicon Thin Films

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Photoluminescence study of polycrystalline silicon thin films prepared by liquid and solid phase crystallization

physica status solidi (a) ◽

10.1002/pssa.201228809 ◽

2013 ◽

Vol 210 (8) ◽

pp. 1652-1656 ◽

Author(s):

S. Schönau ◽

J. Rappich ◽

M. Weizman ◽

D. Amkreutz ◽

B. Rech

Keyword(s):

Polycrystalline Silicon ◽

Solid Phase ◽

Solid Phase Crystallization ◽

Photoluminescence Study ◽

Silicon Thin Films

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Dependence of thin film transistor characteristics on low-angle grain boundaries of (100)-oriented polycrystalline silicon thin films

Japanese Journal of Applied Physics ◽

10.7567/1347-4065/ab02e5 ◽

2019 ◽

Vol 58 (SB) ◽

pp. SBBJ08 ◽

Author(s):

Thi Thuy Nguyen ◽

Shin-Ichiro Kuroki

Keyword(s):

Thin Film ◽

Grain Boundaries ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Silicon Thin Films ◽

Oriented Polycrystalline

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Large area polycrystalline silicon thin films grown by laser-induced nucleation and solid phase crystallization

Thin Solid Films ◽

10.1016/s0040-6090(96)09383-2 ◽

1997 ◽

Vol 296 (1-2) ◽

pp. 49-52 ◽

Author(s):

D. Toet ◽

B. Koopmans ◽

R.B. Bergmann ◽

B. Richards ◽

P.V. Santos ◽

...

Keyword(s):

Polycrystalline Silicon ◽

Solid Phase ◽

Solid Phase Crystallization ◽

Silicon Thin Films

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Study of large-grained n-type polycrystalline silicon thin films made by the solid phase crystallization method

2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) ◽

10.1109/pvsc.2013.6744219 ◽

2013 ◽

Author(s):

A. Kumar ◽

P.I. Widenborg ◽

F. Law ◽

H. Hidayat ◽

G.K. Dalapati ◽

...

Keyword(s):

Polycrystalline Silicon ◽

Solid Phase ◽

Solid Phase Crystallization ◽

Silicon Thin Films ◽

Crystallization Method

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Polycrystalline silicon thin films formed by metal-induced solid phase crystallization of amorphous silicon

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581486 ◽

1998 ◽

Vol 16 (6) ◽

pp. 3352-3358 ◽

Author(s):

Y. Z. Wang ◽

O. O. Awadelkarim

Keyword(s):

Amorphous Silicon ◽

Polycrystalline Silicon ◽

Solid Phase ◽

Solid Phase Crystallization ◽

Silicon Thin Films

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Electrical activity of geometrically necessary dislocations in polycrystalline silicon thin films prepared by solid phase crystallization

physica status solidi (a) ◽

10.1002/pssa.201431271 ◽

2014 ◽

Vol 211 (11) ◽

pp. 2488-2492 ◽

Author(s):

Cangming Ke ◽

Felix Law ◽

Per I. Widenborg ◽

Armin G. Aberle ◽

Ian M. Peters

Keyword(s):

Electrical Activity ◽

Polycrystalline Silicon ◽

Solid Phase ◽

Solid Phase Crystallization ◽

Silicon Thin Films

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In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

physica status solidi (a) ◽

10.1002/pssa.201330056 ◽

2013 ◽

Vol 210 (12) ◽

pp. 2729-2735 ◽

Author(s):

Ingmar Höger ◽

Thomas Schmidt ◽

Anja Landgraf ◽

Martin Schade ◽

Annett Gawlik ◽

...

Keyword(s):

Laser Irradiation ◽

Excimer Laser ◽

Polycrystalline Silicon ◽

Solid Phase ◽

Solid Phase Epitaxy ◽

Silicon Thin Films ◽

Excimer Laser Irradiation

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Effects of boron doping on solid phase crystallization of in situ doped amorphous Silicon thin films prepared by electron beam evaporation

Thin Solid Films ◽

10.1016/j.tsf.2019.137639 ◽

2020 ◽

Vol 694 ◽

pp. 137639 ◽

Author(s):

Salar H. Sedani ◽

Ozlen F. Yasar ◽

Mehmet Karaman ◽

Rasit Turan

Keyword(s):

Electron Beam ◽

Amorphous Silicon ◽

Solid Phase ◽

Boron Doping ◽

Electron Beam Evaporation ◽

Solid Phase Crystallization ◽

Silicon Thin Films

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Three-dimensional thin-film-transistor silicon-oxide-nitride-oxide-silicon memory cell formed on large grain sized polysilicon films using nuclei induced solid phase crystallization

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.2055327 ◽

2005 ◽

Vol 23 (5) ◽

pp. 2184 ◽

Author(s):

S. Gu ◽

S. V. Dunton ◽

A. J. Walker ◽

S. Nallamothu ◽

E. H. Chen ◽

...

Keyword(s):

Thin Film ◽

Silicon Oxide ◽

Solid Phase ◽

Thin Film Transistor ◽

Three Dimensional ◽

Memory Cell ◽

Solid Phase Crystallization ◽

Polysilicon Films ◽

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Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.280-283.1147 ◽

2007 ◽

Vol 280-283 ◽

pp. 1147-1148 ◽

Author(s):

Hai Feng Li ◽

Yong Huang ◽

Zhi Jian Wan ◽

Hou Xing Zhang ◽

Li Ming Zhang ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Chemical Treatment ◽

Polycrystalline Silicon ◽

Crystal Size ◽

Ultrasonic Method ◽

Preferred Orientation ◽

Silicon Thin Films ◽

The thin-film of silicon deposited by RTCVD on pressureless sintered SiC substrate with the size of 30mm×20mm, which is cleaned by ultrasonic method and chemical treatment. The crystal size of silicon columnar grain can reach 190 µm and its preferred orientation is [111] after ZMR process.

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