Calibration of measurement sensitivities of multiple micro-cantilever dynamic modes in atomic force microscopy using a contact detection method

In this paper an analytical model is presented for the Micro-Cantilever (MC) of Atomic Force Microscopy with Side Wall probe (AFM-SW) in the tapping excitation mode. In this model the couple motion of the MC is taken into account while the torsional motion is considered as an undesirable motion which is coupled with the vertical motion. To this end, the effect of several parameters, namely; probe mass, probe dislocation, sidewall extension length, and tip sample interaction force is investigated on the occurrence probability of torsional and vertical motions. It is found that the probe dislocation is the prerequisite factor of the undesired motion happening. For sake of validation, the analytical results are compared against the previously published results, and an excellent agreement is observed.

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Detection for Spring Constant of Microcantilevers in Atomic Force Microscopy Based on Frequency Measurements

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.60-61.49 ◽

2009 ◽

Vol 60-61 ◽

pp. 49-52

Author(s):

Fei Wang ◽

Xue Zeng Zhao

Keyword(s):

Atomic Force Microscopy ◽

Young’S Modulus ◽

Young's Modulus ◽

Spring Constant ◽

Force Microscopy ◽

Frequency Measurements ◽

Fea Model ◽

Atomic Force ◽

Vibration Model ◽

Micro Cantilever

Micro cantilevers in atomic force microscopy are important force sensors in nano research, and the spring constant is one of the most important parameters of the cantilevers. Normal testing methods are not suitable for the spring constant detecting of micro cantilevers according to the strict scale of the cantilevers, and new methods are needed to the study of micro cantilevers. A method for detecting of spring constant of micro cantilevers based on combining the numerical simulation and frequency measurements is presented in this paper. The new method involves four steps, the first step is developing the vibration model of the micro cantilever studied immersed in air and determine the fluid parameters in the model during dynamic tests in atomic force microscopy presented in this paper; the second step is analyzing the vibration behavior of the corresponding cantilevers with the same geometry but different young’s modulus. The third step is measuring the natural frequencies of the micro cantilevers and comparing the experimental results with the numerical results to determine the young’s modulus of the cantilever. The last step is conducting the young’s modulus to the cantilever FEA model for determination of its spring constant. Experiments on a NSC cantilever have been done to validate the method presented in this paper.

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Transfer Function Analysis of the Micro Cantilever Used in Atomic Force Microscopy

IEEE Transactions on Nanotechnology ◽

10.1109/tnano.2006.883479 ◽

2006 ◽

Vol 5 (6) ◽

pp. 692-700 ◽

Cited By ~ 26

Author(s):

F. Javier Rubio-Sierra ◽

Rafael Vazquez ◽

Robert W. Stark

Keyword(s):

Atomic Force Microscopy ◽

Transfer Function ◽

Function Analysis ◽

Force Microscopy ◽

Atomic Force ◽

Transfer Function Analysis ◽

Micro Cantilever

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Modeling the tip-sample interaction in atomic force microscopy with Timoshenko beam theory

Mathematics of Quantum Technologies ◽

10.2478/nsmmt-2013-0008 ◽

2013 ◽

Vol 2 (1) ◽

Author(s):

Julio R. Claeyssen ◽

Teresa Tsukazan ◽

Leticia Tonetto ◽

Daniela Tolfo

Keyword(s):

Atomic Force Microscopy ◽

Boundary Conditions ◽

Timoshenko Beam ◽

Beam Theory ◽

Surface Effects ◽

Mode Shapes ◽

Force Microscopy ◽

Atomic Force ◽

Matrix Differential ◽

Micro Cantilever

AbstractA matrix framework is developed for single and multispan micro-cantilevers Timoshenko beam models of use in atomic force microscopy (AFM). They are considered subject to general forcing loads and boundary conditions for modeling tipsample interaction. Surface effects are considered in the frequency analysis of supported and cantilever microbeams. Extensive use is made of a distributed matrix fundamental response that allows to determine forced responses through convolution and to absorb non-homogeneous boundary conditions. Transients are identified from intial values of permanent responses. Eigenanalysis for determining frequencies and matrix mode shapes is done with the use of a fundamental matrix response that characterizes solutions of a damped second-order matrix differential equation. It is observed that surface effects are influential for the natural frequency at the nanoscale. Simulations are performed for a bi-segmented free-free beam and with a micro-cantilever beam actuated by a piezoelectric layer laminated in one side.

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