Inductively coupled plasma etching of GaAs suspended photonic crystal cavities

Photonic Crystal Cavities ◽

Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal

Acta Physica Sinica ◽

10.7498/aps.56.977 ◽

2007 ◽

Vol 56 (2) ◽

pp. 977

Author(s):

Ma Xiao-Tao ◽

Zheng Wan-Hua ◽

Ren Gang ◽

Fan Zhong-Chao ◽

Chen Liang-Hui

Keyword(s):

Photonic Crystal ◽

Plasma Etching ◽

Two Dimensional ◽

Fabrication of high-aspect-ratio double-slot photonic crystal waveguide in InP heterostructure by inductively coupled plasma etching using ultra-low pressure

AIP Advances ◽

10.1063/1.4793082 ◽

2013 ◽

Vol 3 (2) ◽

pp. 022122 ◽

Cited By ~ 5

Author(s):

Kaiyu Cui ◽

Yongzhuo Li ◽

Xue Feng ◽

Yidong Huang ◽

Wei Zhang

Keyword(s):

Photonic Crystal ◽

Aspect Ratio ◽

Plasma Etching ◽

High Aspect Ratio ◽

Low Pressure ◽

Photonic Crystal Waveguide ◽

Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl/sub 2/

International Conference on Indium Phosphide and Related Materials, 2005. ◽

10.1109/iciprm.2005.1517542 ◽

2005 ◽

Author(s):

C.F. Caristrom ◽

R. van der Heijden ◽

A.A.M. Kok ◽

R.W. van der Heijden ◽

F. Karouta ◽

...

Keyword(s):

Photonic Crystal ◽

Plasma Etching ◽

Fabrication of Indium Phosphide Compound Photonic Crystal by Hydrogen Iodide/Xenon Inductively Coupled Plasma Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.l1400 ◽

2004 ◽

Vol 43 (No. 11A) ◽

pp. L1400-L1402 ◽

Cited By ~ 7

Author(s):

Masayuki Fujita ◽

Atsushi Sugitatsu ◽

Toshitsugu Uesugi ◽

Susumu Noda

Keyword(s):

Photonic Crystal ◽

Indium Phosphide ◽

Plasma Etching ◽

Hydrogen Iodide ◽

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

Fabrication of high quality factor GaAs/InAsSb photonic crystal microcavities by inductively coupled plasma etching and fast wet etching

10.1116/1.4836517 ◽

2014 ◽

Vol 32 (1) ◽

pp. 011204 ◽

Cited By ~ 6

Author(s):

Iván Prieto González ◽

Luis Enrique Muñoz Camuñez ◽

Alfonso González Taboada ◽

Carmen Robles Urdiales ◽

Jose María Ripalda Cobián ◽

...

Keyword(s):

Photonic Crystal ◽

Quality Factor ◽

Plasma Etching ◽

Wet Etching ◽

High Quality Factor ◽

High Quality ◽

Inductively Coupled ◽

Photonic Crystal Microcavities

Inductively coupled plasma etching for delineation of InAs/GaSb pixels

10.1117/12.930046 ◽

2012 ◽

Cited By ~ 1

Author(s):

Jean Nguyen ◽

John Gill ◽

Sir B. Rafol ◽

Alexander Soibel ◽

Arezou Khoshakhlagh ◽

...

Keyword(s):

Plasma Etching ◽

Inductively coupled plasma etching of HgCdTe using a CH4-based mixture

Journal of Electronic Materials ◽

10.1007/s11664-005-0013-9 ◽

2005 ◽

Vol 34 (6) ◽

pp. 740-745 ◽

Cited By ~ 21

Author(s):

E. Laffosse ◽

J. Baylet ◽

J. P. Chamonal ◽

G. Destefanis ◽

G. Cartry ◽

...

Keyword(s):

Plasma Etching ◽

Optimized inductively coupled plasma etching for poly(methyl-methacrylate-glycidly-methacrylate) optical waveguide

Thin Solid Films ◽

10.1016/j.tsf.2012.05.016 ◽

2012 ◽

Vol 520 (18) ◽

pp. 5946-5951 ◽

Cited By ~ 9

Author(s):

Xiaoqiang Sun ◽

Xiaodong Li ◽

Changming Chen ◽

Kun Zhang ◽

Jie Meng ◽

...

Keyword(s):

Methyl Methacrylate ◽

Optical Waveguide ◽

Plasma Etching ◽

Poly Methyl Methacrylate ◽

Low resistivity contacts to plasma etched Mg-doped GaN using very low power inductively coupled plasma etching

Thin Solid Films ◽

10.1016/j.tsf.2011.01.276 ◽

2011 ◽

Vol 519 (11) ◽

pp. 3686-3689 ◽

Cited By ~ 4

Author(s):

A. Baharin ◽

R.S. Pinto ◽

U.K. Mishra ◽

B.D. Nener ◽

G. Parish

Keyword(s):

Low Power ◽

Plasma Etching ◽

Low Resistivity ◽

Inductively Coupled ◽

Mg Doped

Fabrication of GaN nanorods by inductively coupled plasma etching via SiO2 nanosphere lithography

Thin Solid Films ◽

10.1016/j.tsf.2009.01.144 ◽

2009 ◽

Vol 517 (14) ◽

pp. 3859-3861 ◽

Cited By ~ 26

Author(s):

Byung-Jae Kim ◽

Hyunjung Jung ◽

Hong-Yeol Kim ◽

Joona Bang ◽

Jihyun Kim

Keyword(s):

Plasma Etching ◽

Nanosphere Lithography ◽