Fabrication and characterization of sub-100/10 nm planar nanofluidic channels by triple thermal oxidation and silicon-glass anodic bonding
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2011 ◽
Vol 3
(6)
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pp. 926-931
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2007 ◽
Vol 142
(8)
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pp. 437-440
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Fabrication and characterization of silicon nanocrystals by thermal oxidation of a-Si:H films in air
2003 ◽
Vol 21
(2)
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pp. 719
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2012 ◽
Vol 585
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pp. 124-128
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2012 ◽
Vol 51
(6S)
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pp. 06FE19
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2012 ◽
Vol 51
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pp. 06FE19
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