In situ plasma enhanced atomic layer deposition half cycle study of Al2O3 on AlGaN/GaN high electron mobility transistors
2011 ◽
Vol 8
(7-8)
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pp. 2445-2447
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2015 ◽
Vol 36
(5)
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pp. 442-444
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2013 ◽
Vol 34
(6)
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pp. 744-746
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