Early stage oxynitridation process of Si(001) surface by NO gas: Reactive molecular dynamics simulation study
2019 ◽
Vol 156
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pp. 35-46
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2019 ◽
Vol 166
(13)
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pp. A2928-A2938
2018 ◽
Vol 20
(35)
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pp. 22600-22609
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2017 ◽
Vol 31
(5)
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pp. 497-505
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