Reaction Mechanism of Atomic Layer Deposition of Aluminum Sulfide using Trimethylaluminum and Hydrogen Sulfide
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Atomic layer deposition (ALD) is a nanopreparation technique for materials and is widely used in the fields of microelectronics, energy and catalysis. ALD methods for metal sulfides, such as Al2S3...
2016 ◽
Vol 16
(5)
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pp. 4924-4928
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2013 ◽
Vol 117
(27)
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pp. 14241-14246
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2022 ◽
Vol 40
(2)
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pp. 022401