scholarly journals Direct synthesis of biaxially textured nickel disilicide thin films by magnetron sputter deposition on low-cost metal tapes for flexible silicon devices

2019 ◽  
Vol 114 (8) ◽  
pp. 083502
Author(s):  
Yongkuan Li ◽  
Ying Gao ◽  
Yao Yao ◽  
Sicong Sun ◽  
Devendra Khatiwada ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Cost ◽  
Direct Synthesis ◽  
Sputter Deposition ◽  
Silicon Devices ◽  
Magnetron Sputter Deposition ◽  
Nickel Disilicide ◽  
Magnetron Sputter

Single‐target magnetron sputter deposition of high‐Tcsuperconducting Bi‐Sr‐Ca‐Cu‐O thin films

1988 ◽  
Vol 64 (10) ◽  
pp. 5259-5261 ◽  
Author(s):  
Neelkanth G. Dhere ◽  
John P. Goral ◽  
Alice R. Mason ◽  
Ramesh G. Dhere ◽  
Ronald H. Ono
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Single Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films

2018 ◽  
Vol 5 (3) ◽  
pp. 036410 ◽  
Author(s):  
Poreddy Chaitanya Akshara ◽  
Guruswamy Rajaram ◽  
M Ghanashyam Krishna
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Composite Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Amorphous Sic

Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter ◽  
P Type

scholarly journals Macrocrystalline silicon thin films prepared by RF reactive magnetron sputter deposition

Vacuum ◽  
1995 ◽  
Vol 46 (12) ◽  
pp. 1385-1390 ◽  
Author(s):  
MF Cerqueira ◽  
M Andritschky ◽  
L Rebouta ◽  
JA Ferreira ◽  
MF da Silva
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Reactive Magnetron ◽  
Silicon Thin Films ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter
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