Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10\bar10)Al2O3by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes

2009 ◽  
Vol 48 (4) ◽  
pp. 04C139 ◽  
Author(s):  
Sun Jin Yun ◽  
Jung Wook Lim ◽  
Jong-Su Noh ◽  
Bong-Jun Kim ◽  
Hyun-Tak Kim
Keyword(s):  
Thin Films ◽  
Vanadium Dioxide ◽  
Sputter Deposition ◽  
Subsequent Annealing ◽  
Vanadium Sesquioxide ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter

Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

2009 ◽  
Vol 12 (4) ◽  
pp. H109 ◽  
Author(s):  
Jun Kwan Kim ◽  
Jung Wook Lim ◽  
Hyun Tak Kim ◽  
Sang Hoon Kim ◽  
Sun Jin Yun
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Zno Thin Films ◽  
Magnetron Sputter Deposition ◽  
Rf Magnetron Sputter ◽  
Magnetron Sputter ◽  
P Type
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