Fabrication of p-Type ZnO Thin Films Using rf-Magnetron Sputter Deposition

Electrochemical and Solid-State Letters ◽

10.1149/1.3067756 ◽

2009 ◽

Vol 12 (4) ◽

pp. H109 ◽

Author(s):

Jun Kwan Kim ◽

Jung Wook Lim ◽

Hyun Tak Kim ◽

Sang Hoon Kim ◽

Sun Jin Yun

Keyword(s):

Sputter Deposition ◽

Zno Thin Films ◽

Magnetron Sputter Deposition ◽

Rf Magnetron Sputter ◽

Magnetron Sputter ◽

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Vanadium Dioxide and Vanadium Sesquioxide Thin Films Fabricated on (0001) or (10\bar10)Al2O3by Reactive RF-Magnetron Sputter Deposition and Subsequent Annealing Processes

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.04c139 ◽

2009 ◽

Vol 48 (4) ◽

pp. 04C139 ◽

Author(s):

Sun Jin Yun ◽

Jung Wook Lim ◽

Jong-Su Noh ◽

Bong-Jun Kim ◽

Hyun-Tak Kim

Keyword(s):

Vanadium Dioxide ◽

Sputter Deposition ◽

Subsequent Annealing ◽

Vanadium Sesquioxide ◽

Magnetron Sputter Deposition ◽

Rf Magnetron Sputter ◽

Magnetron Sputter

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Characterization of the energy flux toward the substrate during magnetron sputter deposition of ZnO thin films

Plasma Sources Science and Technology ◽

10.1088/0963-0252/22/2/025019 ◽

2013 ◽

Vol 22 (2) ◽

pp. 025019 ◽

Author(s):

S Bornholdt ◽

N Itagaki ◽

K Kuwahara ◽

H Wulff ◽

M Shiratani ◽

...

Keyword(s):

Energy Flux ◽

Sputter Deposition ◽

Zno Thin Films ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Optimizing the discharge voltage in magnetron sputter deposition of high quality Al-doped ZnO thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4927437 ◽

2015 ◽

Vol 33 (6) ◽

pp. 061503 ◽

Author(s):

Fanping Meng ◽

Shou Peng ◽

Genbao Xu ◽

Yun Wang ◽

Fangfang Ge ◽

...

Keyword(s):

Discharge Voltage ◽

Sputter Deposition ◽

Zno Thin Films ◽

High Quality ◽

Magnetron Sputter Deposition ◽

Doped Zno ◽

Magnetron Sputter

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Composition control of PZT thin films by varying technological parameters of RF magnetron sputter deposition

Journal of Physics Conference Series ◽

10.1088/1742-6596/872/1/012022 ◽

2017 ◽

Vol 872 ◽

pp. 012022 ◽

Author(s):

V P Pronin ◽

D M Dolgintsev ◽

I P Pronin ◽

S V Senkevich ◽

E Yu Kaptelov ◽

...

Keyword(s):

Sputter Deposition ◽

Technological Parameters ◽

Pzt Thin Films ◽

Composition Control ◽

Magnetron Sputter Deposition ◽

Rf Magnetron Sputter ◽

Magnetron Sputter

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DC/RF magnetron sputter deposition and characterisation of Ca3Si2N2O4:Eu2+ luminescent thin films

Journal of Luminescence ◽

10.1016/j.jlumin.2015.03.008 ◽

2015 ◽

Vol 164 ◽

pp. 52-56 ◽

Author(s):

Michiel de Jong ◽

Victor E. van Enter ◽

Erik van der Kolk

Keyword(s):

Sputter Deposition ◽

Magnetron Sputter Deposition ◽

Rf Magnetron Sputter ◽

Magnetron Sputter

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Synthesis and characterization of photochromic Ag-embedded TiO2 nanocomposite thin films by non-reactive RF-magnetron sputter deposition

Applied Surface Science ◽

10.1016/j.apsusc.2012.04.054 ◽

2012 ◽

Vol 258 (18) ◽

pp. 7231-7237 ◽

Author(s):

J. Zuo ◽

P. Keil ◽

G. Grundmeier

Keyword(s):

Sputter Deposition ◽

Synthesis And Characterization ◽

Nanocomposite Thin Films ◽

Magnetron Sputter Deposition ◽

Rf Magnetron Sputter ◽

Magnetron Sputter

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RF magnetron sputter deposition and analysis of strontium-doped lead zirconate titanate thin films

10.1117/12.668052 ◽

2005 ◽

Author(s):

Sharath Sriram ◽

Madhu Bhaskaran ◽

Anthony S. Holland ◽

Ernest Fardin ◽

Sasikaran Kandasamy

Keyword(s):

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Sputter Deposition ◽

Zirconate Titanate ◽

Magnetron Sputter Deposition ◽

Rf Magnetron Sputter ◽

Magnetron Sputter

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Characterization of indium tin oxide and al-doped Zinc oxide thin films deposited by confocal RF magnetron sputter deposition

2009 34th IEEE Photovoltaic Specialists Conference (PVSC) ◽

10.1109/pvsc.2009.5411222 ◽

2009 ◽

Author(s):

S. Jay Chey ◽

Wei Liu ◽

Min Yuan ◽

David B. Mitzi

Keyword(s):

Tin Oxide ◽

Indium Tin Oxide ◽

Sputter Deposition ◽

Oxide Thin Films ◽

Magnetron Sputter Deposition ◽

Rf Magnetron Sputter ◽

Magnetron Sputter

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Effect of the nature of the working gas on the d.c. magnetron sputter deposition of chromium nitride and oxi-nitride thin films on steel substrates

Surface and Coatings Technology ◽

10.1016/0257-8972(95)02709-2 ◽

1996 ◽

Vol 80 (1-2) ◽

pp. 190-194 ◽

Author(s):

J. Baborowski ◽

M. Charbonnier ◽

M. Romand

Keyword(s):

Sputter Deposition ◽

Chromium Nitride ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

Steel Substrates

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Exceptions to the microstructure zone model revealed by the reactive d.c. magnetron sputter deposition of δ-TiNx thin films

Surface and Coatings Technology ◽

10.1016/0257-8972(93)90136-c ◽

1993 ◽

Vol 60 (1-3) ◽

pp. 480-483 ◽

Author(s):

V. Poulek ◽

C. Quaeyhaegens ◽

G. Knuyt ◽

L. Stals ◽

V. Fagard

Keyword(s):

Sputter Deposition ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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