Preliminary study: Measurement of ion beam energy spreads produced by a Penning ionization gauge-type ion source using electromagnets for a mega-electron volt compact ion microbeam system

2020 ◽  
Vol 91 (4) ◽  
pp. 043304
Author(s):  
Y. Ishii ◽  
T. Ohkubo ◽  
H. Kashiwagi ◽  
Y. Miyake
1988 ◽  
Vol 6 (4) ◽  
pp. 2451-2456 ◽  
Author(s):  
Yoshikazu Yoshida ◽  
Teruhito Ohnishi ◽  
Yuichi Hirofuji

2006 ◽  
Vol 77 (3) ◽  
pp. 03A330
Author(s):  
W. He ◽  
H. W. Zhao ◽  
Zh. W. Liu ◽  
H. Y. Zhao ◽  
Y. Cao ◽  
...  

1985 ◽  
Vol 56 (10) ◽  
pp. 1894-1896 ◽  
Author(s):  
Ian G. Brown ◽  
James E. Galvin ◽  
Basil F. Gavin ◽  
Robert A. MacGill

Vacuum ◽  
2010 ◽  
Vol 84 (9) ◽  
pp. 1133-1137 ◽  
Author(s):  
Š. Meškinis ◽  
V. Kopustinskas ◽  
A. Tamulevičienė ◽  
S. Tamulevičius ◽  
G. Niaura ◽  
...  

The article presents the results of the development of a system for measuring emittance characteristics of ion sources studied at the IAP NAS of Ukraine with the aim of obtaining the ion beams with a high brightness. The emittance measurement system is based on the scheme of an electrostatic scanner and consists of two main parts: the scanner, which moves in the direction perpendicular to the beam axis using a stepper motor, and the electronic system of control, processing and data acquisition. The electronic system contains a Raspberry pi 3B microcomputer, precision DAC/ADCs, the high-voltage amplifier of a scanning voltage up to ±500 V on deflection plates of the scanner and a wide range current integrator. The determination of the emittance consists in measuring the ion beam intensity distribution when the scanner moves along the x-coordinate and the electrostatic scanning along the x´ angle. The obtained two-dimensional data array allows determining the main characteristics of ion beam: geometric 90% emittance, the root mean square (rms) emittance, the Twiss parameters and phase ellipse of rms emittance, the beam current profile and the angle current density distribution. To test the performance and functionality of the system, the emittance characteristics of the penning type ion source were measured. The working gas was helium, and the beam energy varied within 7–15 keV. At 13 keV of beam energy the following emittances of the He+ ions beam was obtained: 90% emittance is 30 π∙mm∙mrad, rms emittance is 8.4 mm∙mrad, and the normalized rms emittance is equal to 0.022 mm∙mrad. The developed system for measuring the emittance of the ion beams is characterized by a short measurement time of 10-15 minutes.


1995 ◽  
Vol 396 ◽  
Author(s):  
Y. Park ◽  
Y.W. Ko ◽  
M.H. Sohn ◽  
S.I. Kim

AbstractA compact negative metal ion beam source for direct low energy metal ion beam depositions studies in ultra high vacuum (UHV) environment, has been developed. The ion source is based on SKION's Solid State Ion Beam Technology. The secondary negative metal ion beam is effectively produced by primary cesium positive ion bombardment (negative ion yield varies from 0.1-0.5 for carbon). The beam diameter is in the range of 0.2∼3.0 cm depending on the focusing and ion beam energy. The ion source produces negative ion currents of about 0.8 mA/cm2. The energy spread of the ion beam is less then ±5% of the ion beam energy. The energy of negative metal ion beam can be independently controlled in the range of 10-300 eV. Due to the complete solid state ion technology , the source can be operated while maintaining chamber pressures of less then 10-10 Torr.


2002 ◽  
Vol 73 (2) ◽  
pp. 852-853
Author(s):  
Song Zhizhong ◽  
Yu JinXiang ◽  
Dong Guocai ◽  
Zhang Jun ◽  
Wang Zhongyi ◽  
...  

1990 ◽  
Vol 61 (1) ◽  
pp. 598-600 ◽  
Author(s):  
Yoshikazu Yoshida ◽  
Teruhito Ohnishi ◽  
Yuichi Hirofuji ◽  
Tanejiro Ikeda

1990 ◽  
Vol 62 (14) ◽  
pp. 1547-1549 ◽  
Author(s):  
Kuangnan. Qian ◽  
Anil. Shukla ◽  
Jean. Futrell

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