scholarly journals Electron-cyclotron resonance heating in plasmas with arbitrary stratification of the magnetic field

1981 ◽  
Vol 24 (6) ◽  
pp. 1097 ◽  
Author(s):  
L. Friedland
Keyword(s):  
Magnetic Field ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Heating ◽  
The Magnetic Field

Dependence of the a-Si:H Defect Density of States on the Magnetic Field Profile of an Electron Cyclotron Resonance Microwave Plasma

1992 ◽  
Vol 258 ◽  
Author(s):  
F.S. Pool ◽  
J.M. Essick ◽  
Y.H. Shing ◽  
R.T. Mather
Keyword(s):  
Magnetic Field ◽  
Density Of States ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Microwave Plasma ◽  
Defect Density ◽  
Electron Cyclotron ◽  
Field Profile ◽  
Magnetic Field Profile ◽  
The Magnetic Field

ABSTRACTThe magnetic field profile of an electron cyclotron resonance (ECR) microwave plasma was systematically altered to determine subsequent effects on a-Si:H film quality. Films of a-Si:H were deposited at pressures of 0.7 mTorr and 5 mTorr with a H2/SiH4 ratio of approximately three. The mobility gap density of states ND, deposition rate and light to dark conductivity were determined for the a-Si:H films. This data was correlated to the magnetic field profile of the plasma, which was characterized by Langmuir probe measurements of the ion current density. By variation of the magnetic field profile ND could be altered by more than an order of magnitude, from 1×1016 to 1×1017 at 0.7 mTorr and 1×1016 to 5×1017 at 5 mTorr. Two deposition regimes were found to occur for the conditions of this study. Highly divergent magnetic fields resulted in poor quality a-Si:H, while for magnetic field profiles defining a more highly confined plasma, the a-Si:H was of device quality and relatively independent of the magnetic field configuration.

Electron cyclotron resonance heating near the turning point in inhomogeneous magnetic field

1996 ◽  
Vol 3 (9) ◽  
pp. 3318-3323 ◽  
Author(s):  
Y. Tatematsu ◽  
Y. Kiwamoto ◽  
T. Saito ◽  
I. Katanuma ◽  
Y. Yoshimura ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Cyclotron Resonance ◽  
Turning Point ◽  
Electron Cyclotron Resonance ◽  
Inhomogeneous Magnetic Field ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Heating

Magnetic Confinement of Plasmas Generated by Coaxial Twinned Electron Cyclotron Resonance (ECR) Discharge

2011 ◽  
Vol 413 ◽  
pp. 18-23
Author(s):  
Geng Shun Chen ◽  
Rui Hong Tong ◽  
An Hua Zhang
Keyword(s):  
Magnetic Field ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Radial Distance ◽  
Diagnostic Technique ◽  
Magnetic Confinement ◽  
Plasma Potential ◽  
Electron Cyclotron ◽  
Ecr Plasma ◽  
The Magnetic Field

Effects of the magnetic field on confinement of the coaxial twined ECR plasmas were studied using the Lanmuir probe diagnostic technique. Under the magnetic-mirror confinement, the plasma density was quite high in the vicinity of the axis of the ECR sources but it decreased rapidly with increasing radial distance; while under the cusped field confinement, the density was lower but uniform. The trend was similar for the electron temperature and the plasma potential. This property may be utilized in materials processes to meet different requirements. Key words: Electron cyclotron resonance (ECR), Plasma, Magnetic confinement, The cusped field confinement.PACS: 52.80.Pi, 52.55.-s, 52.70.-m

Electron cyclotron resonance heating by strong monochromatic wave in nonuniform magnetic field

1994 ◽  
Vol 1 (4) ◽  
pp. 834-841 ◽  
Author(s):  
Y. Kiwamoto ◽  
T. Saito ◽  
Y. Tatematsu ◽  
I. Katanuma ◽  
Y. Yoshimura ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Nonuniform Magnetic Field ◽  
Electron Cyclotron Resonance Heating ◽  
Monochromatic Wave
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