Non-axisymmetric droplet irradiation effects on ion and extreme ultraviolet light emission of laser-produced plasma light sources

2021 ◽  
Vol 129 (23) ◽  
pp. 233306
Author(s):  
Markus Brandstätter ◽  
Marco M. Weber ◽  
Reza S. Abhari
2012 ◽  
Author(s):  
Tony Donnelly ◽  
Thomas Cummins ◽  
Colm O' Gorman ◽  
Bowen Li ◽  
Colm S. Harte ◽  
...  

Author(s):  
Yun Yuan ◽  
Yan-Yun Ma ◽  
Wenpeng Wang ◽  
Shijia Chen ◽  
Ye Cui ◽  
...  

Abstract In this study, we use the FLASH radiation hydrodynamic code and the FLYCHK atomic code to investigate the energy conversion and spectra associated with laser–Sn target interactions with 1 µm and 2 µm wavelength lasers. We found that the conversion efficiency (CE) reached as much as 3.38% with the 2 µm laser, which is 1.48 percentage points higher than the 1 µm laser (CE = 1.9%). In addition, we analyzed the contribution of dominant ionization states to the emission spectrum for both lasers. We observed that the growths of the out-of-band emission eventually led to a broadening of the spectrum, resulting in a reduction of SP for the 1 µm laser. By contrast, the emission main peaks were all centered near 13.5nm for the 2 µm laser, which is beneficial for efficient emission of light with a 13.5 nm wavelength (relevant for nanolithographic applications).


2018 ◽  
Vol 113 (15) ◽  
pp. 153502 ◽  
Author(s):  
A. G. Shalashov ◽  
A. V. Vodopyanov ◽  
I. S. Abramov ◽  
A. V. Sidorov ◽  
E. D. Gospodchikov ◽  
...  

2015 ◽  
Author(s):  
Eiki Hotta ◽  
Yusuke Sakai ◽  
Yasushi Hayashi ◽  
Gohta Niimi ◽  
Bin Huang ◽  
...  

2010 ◽  
Vol 49 (9) ◽  
pp. 096202 ◽  
Author(s):  
Peng Lu ◽  
Sunao Katsuki ◽  
Nobufumi Tomimaru ◽  
Takahisa Ueno ◽  
Hidenori Akiyama

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