DIELECTRIC PROPERTIES OF ATOMIC LAYER DEPOSITED THIN-FILM BARIUM STRONTIUM TITANATE

2008 ◽  
Vol 102 (1) ◽  
pp. 29-36 ◽  
Author(s):  
M. TYUNINA ◽  
M. PLEKH ◽  
J. LEVOSKA ◽  
M. VEHKAMÄKI ◽  
M. HATANPÄÄ ◽  
...  
2017 ◽  
Vol 727 ◽  
pp. 942-946 ◽  
Author(s):  
Juan Li ◽  
Cong Chun Zhang ◽  
Yan Lei Wang ◽  
Yang Gao ◽  
Xiao Lin Zhao

Barium strontium titanate (BST) thin films with excellent dielectric properties are deposited by on-axis RF magnetron sputtering system. The effects of composition of the target and oxygen partial pressure on the microstructure of BST thin film have been investigated. The dielectric properties of the thin films are investigated. The results show that composition of BST thin film deposited with pure argon ambient by the target with 30atm% excess of Ba and Sr is stoichiometric. Perovskite phase can be observed in the thin film annealed in oxygen at 750 °C for 30 min. A metal-insulator-metal (MIM) capacitor is fabricated by microfabrication technique. The capacitance value at 2 GHz is 0.417 pF and 1.42 pF for 50 nm and 90 nm BST thin film respectively, and the leakage current density is 6×10-6 A/cm2 and 5.35×10-8 A/cm2 respectively.


2002 ◽  
Vol 45 (1) ◽  
pp. 3-12
Author(s):  
Y. Takeshima ◽  
K. Nishita ◽  
K. Tanaka ◽  
Y. Sakabe

Author(s):  
Kiflom Gebremedhn Kelele ◽  
Aschalew Tadesse ◽  
Tegene Desalegn ◽  
Suresh Ghotekar ◽  
Ruthramurthy Balachandran ◽  
...  

Abstract The ferroelectric barium strontium titanate (Ba1-xSrxTiO3) is a homogeneous solid solution prepared from the mixture of barium titanate (BaTiO3), strontium titanate (SrTiO3) and titanium (IV) isopropoxide. Barium strontium titanate (BST) nanomaterials with improved permittivity and dielectric properties due to their nano-properties have attracted great interest for extensive and versatile applications as super capacitors, dielectrics, ceramics and catalysts. Introduction of metal ion dopants into the parent system of BST significantly alters its structural, morphological, electrical, optical and dielectric characteristics. This review is aimed at addressing synthesis, characterization methods, photocatalytic and electrical applications of metal ions doped BST nanomaterials. The effect of doping BST, through metal ions, on its properties and application with most probable reasons have been thoroughly discussed.


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