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Fukutaro Hamaoka ◽  
Takashi Yagisawa ◽  
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Keyword(s):  
Numerical Investigation ◽  
Plasma Structure ◽  
Capacitively Coupled ◽  
Micro Scale ◽  
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Diagnostic Methods ◽  
Capacitively Coupled ◽  
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Phase Lag ◽  
Capacitively Coupled ◽  
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Tianxiang Zhang ◽  
Hanlei Lin ◽  
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Magnetic Field ◽  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
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2021 ◽  
Vol 104 (4) ◽  
Author(s):  
Quan-Zhi Zhang ◽  
Jing-Yu Sun ◽  
Wen-Qi Lu ◽  
Julian Schulze ◽  
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...  
Keyword(s):  
Electron Cyclotron ◽  
Cyclotron Motion ◽  
Capacitively Coupled ◽  
Coupled Plasmas
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