scholarly journals Influence of the oxygen partial pressure and post-deposition annealing on the structure and optical properties of ZnO films grown by dc magnetron sputtering at room temperature

2011 ◽  
Vol 45 (2) ◽  
pp. 025303 ◽  
Author(s):  
M Yuste ◽  
R Escobar Galindo ◽  
I Caretti ◽  
R Torres ◽  
O Sánchez
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Room Temperature ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Post Deposition Annealing ◽  
Post Deposition

Structural and Optical Properties of VO2 Film Grown on Sapphire Substrate by Pulsed Laser Deposition

2014 ◽  
Vol 912-914 ◽  
pp. 325-328 ◽  
Author(s):  
Ji Ming Bian ◽  
Li Hua Miao ◽  
Shu Kuo Zhao
Keyword(s):  
Optical Properties ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Optical Transmission ◽  
Pulsed Laser ◽  
Blue Emission ◽  
Laser Deposition ◽  
Structural And Optical Properties

VO2films were grown on sapphire substrates by pulsed laser deposition (PLD), and the structural and optical properties of as-grown films were investigated by X-ray diffraction (XRD), field effect scanning electron microscopy (FESEM), photoluminescence (PL), and optical-transmission measurements. The oxygen partial pressure in the growth chamber was found to be the key factor deciding the microstructure and properties of as-deposited VO2films, and its effects and corresponding mechanism were investigated systemically. Results indicated that dense and uniform VO2films with smooth surface were achieved by PLD under optimized oxygen partial pressure. Strong blue emission peaks were observed in room temperature photoluminescence (PL) spectra. Excellent selective optical-transmission of the VO2thin films from 200~3000 nm were also recorded at room temperature.

Influence of oxygen partial pressure on properties of N-doped ZnO films deposited by magnetron sputtering

2010 ◽  
Vol 20 (12) ◽  
pp. 2326-2330 ◽  
Author(s):  
Jin-zhong WANG ◽  
E. ElANGOVAN ◽  
N. FRANCO ◽  
A. ALVESE ◽  
A. REGO ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Zno Films ◽  
Doped Zno

Room temperature DC magnetron sputtering deposition and field emission of Al-doped ZnO films

2011 ◽  
Vol 208 (8) ◽  
pp. 1908-1912 ◽  
Author(s):  
Fan Ye ◽  
Xing-Min Cai ◽  
Fu-Ping Dai ◽  
Dong-Ping Zhang ◽  
Ping Fan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Field Emission ◽  
Room Temperature ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Doped Zno

scholarly journals Influence of oxygen partial pressure on the crystal quality and optical properties of Mg-doped ZnO films

2011 ◽  
Vol 60 (3) ◽  
pp. 036804
Author(s):  
Bao Shan-Yong ◽  
Dong Wu-Jun ◽  
Xu Xing ◽  
Luan Tian-Bao ◽  
Li Jie ◽  
...  
Keyword(s):  
Optical Properties ◽  
Oxygen Partial Pressure ◽  
Partial Pressure ◽  
Crystal Quality ◽  
Zno Films ◽  
Doped Zno ◽  
Mg Doped
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