Recent upgrading of the Facility for Modification and Analysis of Materials
with Ion Beams - FAMA, in the Laboratory of Physics of the Vinca Institute of
Nuclear Sciences, included the modernization of its electron cyclotron
resonance ion source. Since the old ion source was being extensively used for
more than 15 years for production of multiply charged ions from gases and
solid substances, its complete reconstruction was needed. The main goal was
to reconstruct its plasma and injection chambers and magnetic structure, and
thus intensify the production of multiply charged ions. Also, it was decided
to refurbish its major subsystems - the vacuum system, the microwave system,
the gas inlet system, the solid substance inlet system, and the control
system. All these improvements have resulted in a substantial increase of ion
beam currents, especially in the case of high charge states, with the
operation of the ion source proven to be stable and reproducible.