Growth and characterization of high quality homoepitaxial ZnO films by RF magnetron sputtering

2007 ◽  
Vol 22 (6) ◽  
pp. 683-686 ◽  
Author(s):  
Il-Soo Kim ◽  
Sang-Hun Jeong ◽  
Byung-Teak Lee
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
High Quality

Characterization of (11\bar20) Textured ZnO Films Fabricated by RF Magnetron Sputtering

2004 ◽  
Vol 43 (5B) ◽  
pp. 3004-3007 ◽  
Author(s):  
Takahiko Yanagitani ◽  
Shin-ichi Tomohiro ◽  
Takuya Nohara ◽  
Mami Matsukawa ◽  
Yoshiaki Watanabe ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Zno Films

Characterization of high quality Cu(In,Ga)Se2thin films prepared by rf-magnetron sputtering

2012 ◽  
Vol 10 (1) ◽  
pp. 129-132 ◽  
Author(s):  
Idris Bouchama ◽  
Kamal Djessas ◽  
Abdeslam Bouloufa ◽  
Jean-Luc Gauffier
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
High Quality

Growth and Application of High Quality ZnO Films Grown on Diamond Substrates

2011 ◽  
Vol 295-297 ◽  
pp. 2011-2014
Author(s):  
Ke Tang ◽  
Lin Jun Wang ◽  
Jian Huang ◽  
Ji Jun Zhang ◽  
Wei Min Shi ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Oxygen Partial Pressure ◽  
Uv Light ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
High Quality ◽  
Current Voltage ◽  
Lift Off ◽  
Effect Of Oxygen ◽  
Photoconductive Detector

Highly c-axis oriented ZnO films were grown on the nucleation sides of freestanding diamond (FSD) substrates with homobuffer layer by radio-frequency (RF) magnetron sputtering method. The effect of oxygen partial pressure (O2/Ar) on the properties of ZnO films was studied. ZnO-based UV photoconductive detector with planar interdigital (IDT) electrodes was fabricated by the lift off technique. Current-voltage (I-V) characteristics of the detector under ultraviolet (UV) light were measured and discussed.

Elaboration and Characterization of Ca Doped ZnO Films Prepared by rf-Magnetron Sputtering at Room Temperature

2011 ◽  
Vol 9 (6) ◽  
pp. 2150-2153 ◽  
Author(s):  
H. Mahdhi ◽  
Z. Ben Ayadi ◽  
L. El Mir ◽  
K. Djessas ◽  
S. Alaya
Keyword(s):  
Magnetron Sputtering ◽  
Room Temperature ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Doped Zno
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