Line edge roughness after development in a positive-tone chemically amplified resist of post-optical lithography investigated by Monte Carlo simulation and a dissolution model
2012 ◽
Vol 51
(8R)
◽
pp. 086504
◽
2012 ◽
Vol 51
◽
pp. 086504
◽
2003 ◽
Vol 21
(1)
◽
pp. 254
◽
2010 ◽
Vol 49
(9)
◽
pp. 096506
◽
2014 ◽
Vol 53
(8)
◽
pp. 084002
◽