Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

A new concept of Atomic Force Microscope (AFM) oscillating probes using electrostatic excitation and piezo-resistive detection is presented. The probe is characterized by electrical methods in vacuum chamber and by mechanical methods in air. The mixer measurement technique is developed to reduce the parasitic signal level. These probes resonance frequencies are in the 1MHz range and the quality factor is measured about 53,000 in vacuum and 3,000 in air. The force resolution deduced from the measurements is about 8 pN/Hz0.5.

Download Full-text

Study of silicon nitride O-ring resonator for gas-sensing applications

Journal of Physics Conference Series ◽

10.1088/1742-6596/1695/1/012124 ◽

2020 ◽

Vol 1695 ◽

pp. 012124

Author(s):

A Elmanova ◽

P An ◽

V Kovalyuk ◽

A Golikov ◽

I Elmanov ◽

...

Keyword(s):

Silicon Nitride ◽

Ring Resonator ◽

Gas Sensing ◽

Sensing Applications

Download Full-text

Stable four-wavelength ring resonator with hybrid serial-tree configuration for sensing applications

2009 11th International Conference on Transparent Optical Networks ◽

10.1109/icton.2009.5185326 ◽

2009 ◽

Author(s):

Davide Passaro ◽

Stefano Selleri ◽

Montserrat Fernandez-Vallejo ◽

Rosa Ana Perez-Herrera ◽

Cesar Elosua Aguado ◽

...

Keyword(s):

Ring Resonator ◽

Sensing Applications

Download Full-text

Static Force Measurement Using Piezoelectric Sensors

Journal of Sensors ◽

10.1155/2021/6664200 ◽

2021 ◽

Vol 2021 ◽

pp. 1-8

Author(s):

Kyungrim Kim ◽

Jinwook Kim ◽

Xiaoning Jiang ◽

Taeyang Kim

Keyword(s):

Surface Charge ◽

Piezoelectric Effect ◽

Force Measurement ◽

Piezoelectric Materials ◽

Force Sensor ◽

Piezoelectric Sensors ◽

Force Sensing ◽

Static Force ◽

Sensing Applications ◽

Direct Piezoelectric Effect

In force measurement applications, a piezoelectric force sensor is one of the most popular sensors due to its advantages of low cost, linear response, and high sensitivity. Piezoelectric sensors effectively convert dynamic forces to electrical signals by the direct piezoelectric effect, but their use has been limited in measuring static forces due to the easily neutralized surface charge. To overcome this shortcoming, several static (either pure static or quasistatic) force sensing techniques using piezoelectric materials have been developed utilizing several unique parameters rather than just the surface charge produced by an applied force. The parameters for static force measurement include the resonance frequency, electrical impedance, decay time constant, and capacitance. In this review, we discuss the detailed mechanism of these piezoelectric-type, static force sensing methods that use more than the direct piezoelectric effect. We also highlight the challenges and potentials of each method for static force sensing applications.

Download Full-text

Enhancing the sensitivity of a standard plasmonic MIM square ring resonator by incorporating the Nano-dots in the cavity

Photonics Letters of Poland ◽

10.4302/plp.v12i1.902 ◽

2020 ◽

Vol 12 (1) ◽

pp. 1 ◽

Cited By ~ 3

Author(s):

Muhammad Ali ALI Butt ◽

Nikolay Kazanskiy

Keyword(s):

Refractive Index ◽

Fano Resonance ◽

Ring Resonator ◽

Plasmonic Waveguide ◽

Metal Insulator ◽

Refractive Index Sensing ◽

Sensing Applications ◽

Resonator Design ◽

Metal Insulator Metal ◽

Mim Waveguide

We studied the metal-insulator-metal square ring resonator design incorporated with nano-dots that serve to squeeze the surface plasmon wave in the cavity of the ring. The E-field enhances at the boundaries of the nano-dots providing a strong interaction of light with the surrounding medium. As a result, the sensitivity of the resonator is highly enhanced compared to the standard ring resonator design. The best sensitivity of 907 nm/RIU is obtained by placing seven nano-dots of radius 4 nm in all four sides of the ring with a period (ᴧ)= 3r. The proposed design will find applications in biomedical science as highly refractive index sensors. Full Text: PDF References:Z. Han, S. I. Bozhevolnyi. "Radiation guiding with surface plasmon polaritons", Rep. Prog. Phys. 76, 016402 (2013). [CrossRef]N.L. Kazanskiy, S.N. Khonina, M.A. Butt. "Plasmonic sensors based on Metal-insulator-metal waveguides for refractive index sensing applications: A brief review", Physica E 117, 113798 (2020). [CrossRef]D.K. Gramotnev, S.I. Bozhevolnyi. "Plasmonics beyond the diffraction limit", Nat. Photonics 4, 83 (2010). [CrossRef]A.N.Taheri, H. Kaatuzian. "Design and simulation of a nanoscale electro-plasmonic 1 × 2 switch based on asymmetric metal–insulator–metal stub filters", Applied Optics 53, 28 (2014). [CrossRef]P. Neutens, L. Lagae, G. Borghs, P. V. Dorpe. "Plasmon filters and resonators in metal-insulator-metal waveguides", Optics Express 20, 4 (2012). [CrossRef]M.A. Butt, S.N. Khonina, N. L. Kazanskiy. "Metal-insulator-metal nano square ring resonator for gas sensing applications", Waves in Random and complex media [CrossRef]M.A.Butt, S.N.Khonina, N.L.Kazanskiy. "Hybrid plasmonic waveguide-assisted Metal–Insulator–Metal ring resonator for refractive index sensing", Journal of Modern Optics 65, 1135 (2018). [CrossRef]M.A.Butt, S.N. Khonina, N.L. Kazanskiy, "Highly sensitive refractive index sensor based on hybrid plasmonic waveguide microring resonator", Waves in Random and complex media [CrossRef]Y. Fang, M. Sun. "Nanoplasmonic waveguides: towards applications in integrated nanophotonic circuits", Light:Science & Applications 4, e294 (2015). [CrossRef]H. Lu, G.X. Wang, X.M. Liu. "Manipulation of light in MIM plasmonic waveguide systems", Chin Sci Bull [CrossRef]J.N. Anker et al. "Biosensing with plasmonic nanosensors", Nature Materials 7, 442 (2008). [CrossRef]M.A.Butt, S.N. Khonina, N.L. Kazanskiy. Journal of Modern Optics 66, 1038 (2019).[CrossRef]Z.-D. Zhang, H.-Y. Wang, Z.-Y. Zhang. "Fano Resonance in a Gear-Shaped Nanocavity of the Metal–Insulator–Metal Waveguide", Plasmonics 8,797 (2013) [CrossRef]Y. Yu, J. Si, Y. Ning, M. Sun, X. Deng. Opt. Lett. 42, 187 (2017) [CrossRef]B.H.Zhang, L-L. Wang, H-J. Li et al. "Two kinds of double Fano resonances induced by an asymmetric MIM waveguide structure", J. Opt. 18,065001 (2016) [CrossRef]X. Zhao, Z. Zhang, S. Yan. "Tunable Fano Resonance in Asymmetric MIM Waveguide Structure", Sensors 17, 1494 (2017) [CrossRef]J. Zhou et al. "Transmission and refractive index sensing based on Fano resonance in MIM waveguide-coupled trapezoid cavity", AIP Advances 7, 015020 (2017) [CrossRef]V. Perumal, U. Hashim. "Advances in biosensors: Principle, architecture and applications", J. Appl. Biomed. 12, 1 (2014)[CrossRef]H.Gai, J. Wang , Q. Tian, "Modified Debye model parameters of metals applicable for broadband calculations", Appl. Opt. 46 (12), 2229 (2007) [CrossRef]

Download Full-text