Intertwisted fibrillar diamond-like carbon films prepared by electron cyclotron resonance microwave plasma enhanced chemical vapour deposition

Chinese Physics ◽

10.1088/1009-1963/12/11/313 ◽

2003 ◽

Vol 12 (11) ◽

pp. 1257-1260 ◽

Author(s):

Yang Wu-Bao ◽

Wang Jiu-Li ◽

Zhang Gu-Ling ◽

Fan Song-Hua ◽

Liu Chi-Zi ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Chemical Vapour ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Resonance Microwave

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Influence of the electron cyclotron resonance microwave plasma on growth and properties of diamond-like carbon films deposited onto r.f. biased substrates

Diamond and Related Materials ◽

10.1016/0925-9635(93)90090-o ◽

1993 ◽

Vol 2 (2-4) ◽

pp. 397-401 ◽

Author(s):

V. Dušek ◽

M. Vaněček ◽

P. Široký ◽

V. Vorlíček

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Resonance Microwave

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Preparation of Diamond-Like carbon Films in methane by Electron Cyclotron Resonance Microwave Plasma Source Ion Implantation

Chinese Physics Letters ◽

10.1088/0256-307x/20/5/329 ◽

2003 ◽

Vol 20 (5) ◽

pp. 692-695 ◽

Author(s):

Li Xin ◽

Tang Zhen-An ◽

Ma Guo-Ja ◽

Wu Zhi-Meng ◽

Deng Xin-Lu

Keyword(s):

Ion Implantation ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Microwave Plasma ◽

Plasma Source ◽

Carbon Films ◽

Electron Cyclotron ◽

Diamond Like Carbon ◽

Plasma Source Ion Implantation ◽

Resonance Microwave

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Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heating

Nanotechnology ◽

10.1088/0957-4484/17/18/003 ◽

2006 ◽

Vol 17 (18) ◽

pp. 4542-4547 ◽

Author(s):

Wen-Tuan Wu ◽

Kuan-Hua Chen ◽

Ching-Ming Hsu

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Cobalt Catalyst ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Thermal Heating ◽

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Application of electron cyclotron resonance chemical vapour deposition in the preparation of hydrogenated boron-doped SiC films

Philosophical Magazine B ◽

10.1080/014186398259950 ◽

1998 ◽

Vol 77 (1) ◽

pp. 197-206

Author(s):

S. F. Yoon, J. Ahn

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Boron Doped ◽

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DC bias effects in the deposition of a-C:H films using the screen-grid method in electron cyclotron resonance chemical vapour deposition

Diamond and Related Materials ◽

10.1016/s0925-9635(98)00180-0 ◽

1998 ◽

Vol 7 (8) ◽

pp. 1213-1218 ◽

Author(s):

S.F Yoon ◽

Rusli ◽

J Ahn ◽

Q Zhang ◽

Y.S Wu ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Grid Method ◽

Electron Cyclotron ◽

Dc Bias ◽

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Physical and electrical analysis of silicon dioxide thin films produced by electron-cyclotron resonance chemical-vapour deposition

Microelectronic Engineering ◽

10.1016/s0167-9317(97)00014-2 ◽

1997 ◽

Vol 36 (1-4) ◽

pp. 53-60 ◽

Author(s):

D. Landheer ◽

L.-Å. Ragnarsson ◽

S. Belkouch

Keyword(s):

Silicon Dioxide ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Electrical Analysis

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Plasma enhanced chemical vapour deposition of silica thin films in an integrated distributed electron cyclotron resonance reactor

Thin Solid Films ◽

10.1016/s0040-6090(97)00539-7 ◽

1997 ◽

Vol 308-309 ◽

pp. 63-67 ◽

Author(s):

P Bulkin ◽

N Bertrand ◽

B Drévillon ◽

J.C Rostaing ◽

F Delmotte ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Silica Thin Films

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Electron cyclotron resonance (ECR) plasma-enhanced chemical vapour deposition of silicon dioxide on strained-SiGe films using tetraethylorthosilicate

Bulletin of Materials Science ◽

10.1007/bf02744953 ◽

1998 ◽

Vol 21 (4) ◽

pp. 283-286

Author(s):

L K Bera ◽

S K Ray ◽

H D Banerjee ◽

C K Maiti

Keyword(s):

Silicon Dioxide ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

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On the bonding structure of hydrogenated carbon nitrides grown by electron cyclotron resonance chemical vapour deposition: towards the synthesis of non-graphitic carbon nitrides

Diamond and Related Materials ◽

10.1016/s0925-9635(01)00582-9 ◽

2002 ◽

Vol 11 (3-6) ◽

pp. 1161-1165 ◽

Author(s):

F. Alonso ◽

R. Gago ◽

I. Jiménez ◽

C. Gómez-Aleixandre ◽

U. Kreissig ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Graphitic Carbon ◽

Bonding Structure ◽

Carbon Nitrides

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Formation of high-quality silicon dioxide films by electron cyclotron resonance plasma oxidation and plasma-enhanced chemical vapour deposition

Thin Solid Films ◽

10.1016/s0040-6090(96)08902-x ◽

1997 ◽

Vol 293 (1-2) ◽

pp. 52-62 ◽

Author(s):

D. Landheer ◽

J.E. Hulse ◽

T. Quance

Keyword(s):

Silicon Dioxide ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

High Quality ◽

Resonance Plasma

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