Spatial profiles of interelectrode electron density in direct current superposed dual-frequency capacitively coupled plasmas

2017 ◽  
Vol 50 (15) ◽  
pp. 155201 ◽  
Author(s):  
Yoshinobu Ohya ◽  
Kenji Ishikawa ◽  
Tatsuya Komuro ◽  
Tsuyoshi Yamaguchi ◽  
Keigo Takeda ◽  
...  
Keyword(s):  
Electron Density ◽  
Direct Current ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas

2013 ◽  
Vol 22 (2) ◽  
pp. 025014 ◽  
Author(s):  
Quan-Zhi Zhang ◽  
Yong-Xin Liu ◽  
Wei Jiang ◽  
Annemie Bogaerts ◽  
You-Nian Wang
Keyword(s):  
Direct Current ◽  
Single Frequency ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Heating Mechanism ◽  
Coupled Plasmas

Direct current superposed dual-frequency capacitively coupled plasmas in selective etching of SiOCH over SiC

2011 ◽  
Vol 45 (2) ◽  
pp. 025203 ◽  
Author(s):  
Tsuyoshi Yamaguchi ◽  
Tatsuya Komuro ◽  
Chishio Koshimizu ◽  
Seigo Takashima ◽  
Keigo Takeda ◽  
...  
Keyword(s):  
Direct Current ◽  
Selective Etching ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Phase modulation in pulsed dual-frequency capacitively coupled plasmas

2014 ◽  
Vol 115 (23) ◽  
pp. 233303 ◽  
Author(s):  
De-Qi Wen ◽  
Quan-Zhi Zhang ◽  
Wei Jiang ◽  
Yuan-Hong Song ◽  
Annemie Bogaerts ◽  
...  
Keyword(s):  
Phase Modulation ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Coupled Plasmas
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