Reaction mechanism in non-thermal plasma enabled methane conversion: correlation between optical emission spectroscopy and gaseous products

2021 ◽  
Author(s):  
Han Bai ◽  
Bangdou Huang ◽  
Yadi Liu ◽  
Cheng Zhang ◽  
Tao Shao
Keyword(s):  
Reaction Mechanism ◽  
Thermal Plasma ◽  
Methane Conversion ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Gaseous Products ◽  
Non Thermal Plasma

Optical emission spectroscopy diagnostic and thermodynamic analysis of thermal plasma enhanced nanocrystalline silicon CVD process

RSC Advances ◽  
2014 ◽  
Vol 4 (29) ◽  
pp. 15131-15137 ◽  
Author(s):  
Tengfei Cao ◽  
Haibao Zhang ◽  
Binhang Yan ◽  
Wei Lu ◽  
Yi Cheng
Keyword(s):  
Chemical Vapor Deposition ◽  
Thermal Plasma ◽  
Vapor Deposition ◽  
Thermal Equilibrium ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Chemical Vapor ◽  
Optical Emission ◽  
Nanocrystalline Silicon ◽  
Equilibrium Analysis

Optical emission spectroscopy and thermal equilibrium analysis were implemented to study the plasma enhanced chemical vapor deposition of nanocrystalline silicon.

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