Electron beam induced orientation selective epitaxial growth of CeO2(100) layers on Si(100) substrates by dc reactive sputtering

Journal of Physics Conference Series ◽

10.1088/1742-6596/100/8/082014 ◽

2008 ◽

Vol 100 (8) ◽

pp. 082014 ◽

Author(s):

T Inoue ◽

Y Nakata ◽

S Shida

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Reactive Sputtering ◽

Selective Epitaxial Growth

Download Full-text

Formation of self‐aligned CoSi2 on selective epitaxial growth silicon layer on (001)Si inside 0.1–0.6 μm oxide openings prepared by electron beam lithography

Applied Physics Letters ◽

10.1063/1.117191 ◽

1996 ◽

Vol 69 (24) ◽

pp. 3692-3694 ◽

Author(s):

J. Y. Yew ◽

H. C. Tseng ◽

L. J. Chen ◽

K. Nakamura ◽

C. Y. Chang

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Electron Beam Lithography ◽

Silicon Layer ◽

Selective Epitaxial Growth

Download Full-text

Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100)/Si(100) Structures using Absorption Electron Imaging System

ECS Transactions ◽

10.1149/1.3206619 ◽

2019 ◽

Vol 25 (6) ◽

pp. 187-197

Author(s):

Tomoyasu Inoue ◽

Shigenari Shida

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Imaging System ◽

Selective Epitaxial Growth ◽

Electron Imaging

Download Full-text

Properties and Mechanism of Si Selective Epitaxial Growth on Al2O3using Electron Beam Irradiation

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.2582 ◽

1993 ◽

Vol 32 (Part 1, No. 6A) ◽

pp. 2582-2586 ◽

Author(s):

Makoto Ishida ◽

Takashi Tomita ◽

Masahiko Fujita ◽

Tetsuro Nakamura

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Electron Beam Irradiation ◽

Beam Irradiation ◽

Selective Epitaxial Growth

Download Full-text

Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100)/Si(100) Structures using Absorption Electron Imaging System

ECS Meeting Abstracts ◽

10.1149/ma2009-02/25/2122 ◽

2009 ◽

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Imaging System ◽

Selective Epitaxial Growth ◽

Electron Imaging

Download Full-text

Low-Temperature Si Selective Epitaxial Growth Using Electron-Beam-Induced Reaction

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.5904 ◽

1995 ◽

Vol 34 (Part 1, No. 11) ◽

pp. 5904-5907 ◽

Author(s):

Fumihiko Hirose ◽

Hitoshi Sakamoto

Keyword(s):

Electron Beam ◽

Low Temperature ◽

Epitaxial Growth ◽

Selective Epitaxial Growth ◽

Induced Reaction

Download Full-text

Hybrid Orientation Substrate Fabrication Using Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100) and (110) Areas on Si(100) Substrates

ECS Meeting Abstracts ◽

10.1149/ma2012-01/16/709 ◽

2012 ◽

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Selective Epitaxial Growth

Download Full-text

A novel fabrication method of Si mesoscopic structures on Al2O3 by selective epitaxial growth using electron beam irradiation

Physica B Condensed Matter ◽

10.1016/0921-4526(96)00432-2 ◽

1996 ◽

Vol 227 (1-4) ◽

pp. 326-329 ◽

Author(s):

Shun-ichi Yanagiya ◽

Hiroyuki Wado ◽

Mamoru Yoshimoto ◽

Makoto Ishida

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Electron Beam Irradiation ◽

Fabrication Method ◽

Beam Irradiation ◽

Selective Epitaxial Growth

Download Full-text

Spatially varied orientation selective epitaxial growth of CeO2(100) and (110) regions on Si(100) substrates by reactive magnetron sputtering utilizing electron beam irradiation

Thin Solid Films ◽

10.1016/j.tsf.2012.05.090 ◽

2012 ◽

Vol 520 (19) ◽

pp. 6179-6182 ◽

Author(s):

Tomoyasu Inoue ◽

Shigenari Shida

Keyword(s):

Electron Beam ◽

Magnetron Sputtering ◽

Epitaxial Growth ◽

Electron Beam Irradiation ◽

Reactive Magnetron Sputtering ◽

Reactive Magnetron ◽

Beam Irradiation ◽

Selective Epitaxial Growth

Download Full-text

Hybrid Orientation Substrate Fabrication Using Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100) and (110) Areas on Si(100) Substrates

ECS Transactions ◽

10.1149/1.3700910 ◽

2012 ◽

Vol 45 (3) ◽

pp. 443-451

Author(s):

T. Inoue ◽

S. Shida

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Selective Epitaxial Growth

Download Full-text

Two dimensional control of electron beam induced orientation selective epitaxial growth of (100) and (110)CeO2 regions on Si(100) substrates

Thin Solid Films ◽

10.1016/j.tsf.2010.12.201 ◽

2011 ◽

Vol 519 (17) ◽

pp. 5775-5779 ◽

Author(s):

Tomoyasu Inoue ◽

Nobuyuki Igarashi ◽

Yuki Kanno ◽

Shigenari Shida

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Two Dimensional ◽

Dimensional Control ◽

Selective Epitaxial Growth

Download Full-text