Hybrid Orientation Substrate Fabrication Using Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100) and (110) Areas on Si(100) Substrates

T. Inoue; S. Shida

doi:10.1149/1.3700910

Hybrid Orientation Substrate Fabrication Using Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100) and (110) Areas on Si(100) Substrates

ECS Transactions ◽

10.1149/1.3700910 ◽

2012 ◽

Vol 45 (3) ◽

pp. 443-451

Author(s):

T. Inoue ◽

S. Shida

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Selective Epitaxial Growth

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Formation of self‐aligned CoSi2 on selective epitaxial growth silicon layer on (001)Si inside 0.1–0.6 μm oxide openings prepared by electron beam lithography

Applied Physics Letters ◽

10.1063/1.117191 ◽

1996 ◽

Vol 69 (24) ◽

pp. 3692-3694 ◽

Cited By ~ 10

Author(s):

J. Y. Yew ◽

H. C. Tseng ◽

L. J. Chen ◽

K. Nakamura ◽

C. Y. Chang

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Electron Beam Lithography ◽

Silicon Layer ◽

Selective Epitaxial Growth

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Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100)/Si(100) Structures using Absorption Electron Imaging System

ECS Transactions ◽

10.1149/1.3206619 ◽

2019 ◽

Vol 25 (6) ◽

pp. 187-197

Author(s):

Tomoyasu Inoue ◽

Shigenari Shida

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Imaging System ◽

Selective Epitaxial Growth ◽

Electron Imaging

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Properties and Mechanism of Si Selective Epitaxial Growth on Al2O3using Electron Beam Irradiation

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.2582 ◽

1993 ◽

Vol 32 (Part 1, No. 6A) ◽

pp. 2582-2586 ◽

Cited By ~ 3

Author(s):

Makoto Ishida ◽

Takashi Tomita ◽

Masahiko Fujita ◽

Tetsuro Nakamura

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Electron Beam Irradiation ◽

Beam Irradiation ◽

Selective Epitaxial Growth

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Electron Beam Induced Orientation Selective Epitaxial Growth of CeO2(100)/Si(100) Structures using Absorption Electron Imaging System

ECS Meeting Abstracts ◽

10.1149/ma2009-02/25/2122 ◽

2009 ◽

Keyword(s):

Electron Beam ◽

Epitaxial Growth ◽

Imaging System ◽

Selective Epitaxial Growth ◽

Electron Imaging

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Low-Temperature Si Selective Epitaxial Growth Using Electron-Beam-Induced Reaction

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.5904 ◽

1995 ◽

Vol 34 (Part 1, No. 11) ◽

pp. 5904-5907 ◽

Cited By ~ 14

Author(s):

Fumihiko Hirose ◽

Hitoshi Sakamoto

Keyword(s):

Electron Beam ◽

Low Temperature ◽

Epitaxial Growth ◽

Selective Epitaxial Growth ◽

Induced Reaction

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