scholarly journals Reactive ion beam etching of piezoelectric ScAlN for bulk acoustic wave device applications

2019 ◽  
Vol 1407 ◽  
pp. 012083
Author(s):  
R James ◽  
Y Pilloux ◽  
H Hegde
Keyword(s):  
Acoustic Wave ◽  
Ion Beam ◽  
Bulk Acoustic Wave ◽  
Ion Beam Etching ◽  
Device Applications ◽  
Acoustic Wave Device ◽  
Wave Device ◽  
Reactive Ion Beam Etching

Ultrafast sputtered ZnO thin films with high kT for acoustic wave device applications

2010 ◽  
Author(s):  
Luis Garcia-Gancedo ◽  
Jorge Pedros ◽  
Andrew J. Flewitt ◽  
William I. Milne ◽  
Gregory M. Ashley ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Wave ◽  
Zno Thin Films ◽  
High K ◽  
Device Applications ◽  
Acoustic Wave Device ◽  
Wave Device

Structural characterisations of AlN/diamond structures used for surface acoustic wave device applications

2003 ◽  
Vol 199 (1) ◽  
pp. 145-150 ◽  
Author(s):  
V. Mortet ◽  
O. Elmazria ◽  
M. Nesládek ◽  
M. Elhakiki ◽  
G. Vanhoyland ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Surface Acoustic Wave Device ◽  
Device Applications ◽  
Acoustic Wave Device ◽  
Wave Device
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