Discharge modeling of a DC magnetron
2021 ◽
Vol 2059
(1)
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pp. 012020
Keyword(s):
Abstract A two-dimensional simulation of a glow discharge of a dc magnetron operating in an argon is performed in this work. The “Plasm” and “Magnetic Fields/No Currents” modules of the COMSOL Multiphysics software package were used for modeling. All models are constructed within the framework of a stationary problem. Obtained results correspond to the physical concepts of the glow discharge of a balanced magnetron
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2006 ◽
Vol 53
(9)
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pp. 2364-2369
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2003 ◽
Vol 125
(17)
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pp. 5227-5235
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1991 ◽
Vol 34
(4)
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pp. 397-401
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2015 ◽
Vol 15
(1)
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pp. 41-48
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2002 ◽
Vol 42
(1-2)
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pp. 13-32
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