Electrical model parameters identification of radiofrequency discharge in argon through 1D3V/PIC-MC model
2018 ◽
Vol 20
(9)
◽
pp. 095401
◽
Keyword(s):
Keyword(s):
Keyword(s):
1984 ◽
pp. 858-866
◽
2009 ◽
Vol 45
(2)
◽
pp. 505-510
◽
Keyword(s):
2012 ◽
Vol 2012
◽
pp. 1-5
Keyword(s):
2018 ◽
Vol 2018
◽
pp. 1-16
◽
2011 ◽
Vol 52-54
◽
pp. 494-499