Real-time spectroscopic ellipsometry studies of the nucleation and grain growth processes in microcrystalline silicon thin films
Keyword(s):
2009 ◽
Vol 27
(6)
◽
pp. 1255-1259
◽
Keyword(s):
2001 ◽
Vol 148
(9)
◽
pp. C632
◽
Keyword(s):
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-715-Pr3-722
◽
Keyword(s):
2006 ◽
Vol 35
(3)
◽
pp. 165-172
◽
2012 ◽
Vol 358
(17)
◽
pp. 1974-1977
◽
Keyword(s):