Electron energy distributions and anomalous skin depth effects in high-plasma-density inductively coupled discharges

2002 ◽  
Vol 66 (6) ◽  
Author(s):  
Alex V. Vasenkov ◽  
Mark J. Kushner
1996 ◽  
Vol 24 (1) ◽  
pp. 129-130 ◽  
Author(s):  
D.P. Lymberopoulos ◽  
R.S. Wise ◽  
D.J. Economou ◽  
T.J. Bartel

2006 ◽  
Vol 77 (3) ◽  
pp. 03B901 ◽  
Author(s):  
S. Mordyk ◽  
V. Miroshnichenko ◽  
A. Nahornyy ◽  
D. Nahornyy ◽  
D. Shulha ◽  
...  

1987 ◽  
Vol 63 (2) ◽  
pp. 661-664
Author(s):  
N. N. Vasil'ev ◽  
V. �. Lukash ◽  
M. N. Mariinskii ◽  
A. V. Nedospasov

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