Electron energy distributions and anomalous skin depth effects in high-plasma-density inductively coupled discharges
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Two-dimensional modeling of high plasma density inductively coupled sources for materials processing
1994 ◽
Vol 12
(1)
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pp. 461
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1996 ◽
Vol 24
(1)
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pp. 129-130
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2006 ◽
Vol 77
(3)
◽
pp. 03B901
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