Harmonic content and time variation of electron energy distributions in high-plasma-density, low-pressure inductively coupled discharges

2003 ◽  
Vol 94 (4) ◽  
pp. 2223-2233 ◽  
Author(s):  
Alex V. Vasenkov ◽  
Mark J. Kushner
Keyword(s):  
Electron Energy ◽  
Plasma Density ◽  
Time Variation ◽  
Low Pressure ◽  
High Plasma ◽  
Energy Distributions ◽  
Inductively Coupled ◽  
Harmonic Content ◽  
High Plasma Density

Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

2015 ◽  
Vol 22 (3) ◽  
pp. 033506 ◽  
Author(s):  
Sung-Ryul Huh ◽  
Nam-Kyun Kim ◽  
Bong-Ki Jung ◽  
Kyoung-Jae Chung ◽  
Yong-Seok Hwang ◽  
...  
Keyword(s):  
Electron Energy ◽  
Low Pressure ◽  
Model Analysis ◽  
Global Model ◽  
Negative Ion ◽  
Energy Distributions ◽  
Inductively Coupled ◽  
Hydrogen Plasmas ◽  
Ion Generation

Ion density and temperature distributions in an inductively coupled high-plasma density reactor

1996 ◽  
Vol 24 (1) ◽  
pp. 129-130 ◽  
Author(s):  
D.P. Lymberopoulos ◽  
R.S. Wise ◽  
D.J. Economou ◽  
T.J. Bartel
Keyword(s):  
Plasma Density ◽  
High Plasma ◽  
Ion Density ◽  
Inductively Coupled ◽  
Temperature Distributions ◽  
High Plasma Density

Relatively high plasma density in low pressure inductive discharges

2015 ◽  
Vol 22 (9) ◽  
pp. 093517
Author(s):  
Hyun-Ju Kang ◽  
Yu-Sin Kim ◽  
Chin-Wook Chung
Keyword(s):  
Plasma Density ◽  
Low Pressure ◽  
High Plasma ◽  
High Plasma Density

Extraction of single-ion beams from helicon ion source in high plasma density operation mode: Experiment and simulation

2006 ◽  
Vol 77 (3) ◽  
pp. 03B901 ◽  
Author(s):  
S. Mordyk ◽  
V. Miroshnichenko ◽  
A. Nahornyy ◽  
D. Nahornyy ◽  
D. Shulha ◽  
...  
Keyword(s):  
Plasma Density ◽  
Operation Mode ◽  
High Plasma ◽  
Ion Beams ◽  
Ion Source ◽  
High Plasma Density ◽  
Experiment And Simulation
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