Nonlocality in spherical-aberration-corrected HAADF STEM images

The successful correction of spherical aberration is an exciting and revolutionary development for the whole field of electron microscopy. Image interpretability can be extended out to sub-Ångstrom levels, thereby creating many novel opportunities for materials characterization. Correction of lens aberrations involves either direct (online) hardware attachments in fixed-beam or scanning TEM or indirect (off-line) software processing using either off-axis electron holography or focal-series reconstruction. This review traces some of the important steps along the path to realizing aberration correction, including early attempts with hardware correctors, the development of online microscope control, and methods for accurate measurement of aberrations. Recent developments and some initial applications of aberration-corrected electron microscopy using these different approaches are surveyed. Finally, future prospects and problems are briefly discussed.

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Annealing Behavior of La2O3 Thin Film Deposited on Si (001) Substrate Studied by Spherical Aberration Corrected TEM/STEM

Transactions of the Materials Research Society of Japan ◽

10.14723/tmrsj.34.297 ◽

2009 ◽

Vol 34 (2) ◽

pp. 297-300

Author(s):

Shin Inamoto ◽

Jun Yamasaki ◽

Eiji Okunishi ◽

Kuniyuki Kakushima ◽

Hiroshi Iwai ◽

...

Keyword(s):

Thin Film ◽

Spherical Aberration ◽

Annealing Behavior ◽

Aberration Corrected

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Application of Spherical-aberration Corrected Electron Microscopy to Nano-materials

Journal of the Vacuum Society of Japan ◽

10.3131/jvsj2.51.695 ◽

2008 ◽

Vol 51 (11) ◽

pp. 695-699 ◽

Cited By ~ 1

Author(s):

Nobuo TANAKA ◽

Jun YAMASAKI ◽

Koh SAITOH

Keyword(s):

Electron Microscopy ◽

Spherical Aberration ◽

Nano Materials ◽

Aberration Corrected

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Electrostatic Aberration Correction in LV-SEM

Microscopy and Microanalysis ◽

10.1017/s1431927600036229 ◽

2000 ◽

Vol 6 (S2) ◽

pp. 746-747 ◽

Cited By ~ 4

Author(s):

D.J. Maas ◽

A. Henstra ◽

M.P.C.M. Krijn ◽

S.A.M. Mentink

Keyword(s):

Electron Microscope ◽

Low Voltage ◽

State Of The Art ◽

Spherical Aberration ◽

Positive Definite ◽

Ease Of Use ◽

Objective Lens ◽

Time Varying ◽

Voltage Electron ◽

Aberration Corrected

The resolution of a low-voltage electron microscope is limited by the chromatic and spherical aberration of the objective lens, see Fig. 1. The design of state-of-the-art objective lenses is optimised for minimal aberrations. Any significant improvement of the resolution requires an aberration corrector. Recently, correction of both Cc and Cs has been demonstrated in SEM, using a combination of magnetic and electrostatic quadrupoles and octupoles (Zach and Haider, 1995). The present paper presents an alternative design, which is based on a purely electrostatic concept, potentially simplifying the ease-of-use of an aberration corrected microscope.In 1936 Scherzer showed that the fundamental lens aberrations of round lenses are positive definite, in absence of time-varying fields and/or space charge. Negative lens aberrations, required for the correction of Cc and Cs, can only be obtained using non-round lenses, e.g. quadrupoles and octupoles (Scherzer, 1947).

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