scholarly journals Structural Analysis at an Atomic Scale Using Spherical Aberration Corrected Electron Microscope

2012 ◽  
Vol 54 (3) ◽  
pp. 159-165
Author(s):  
Yoshifumi OSHIMA ◽  
Yasumasa TANISHIRO ◽  
Takayuki TANAKA ◽  
Kunio TAKAYANAGI
Keyword(s):  
Electron Microscope ◽  
Structural Analysis ◽  
Spherical Aberration ◽  
Atomic Scale ◽  
Aberration Corrected

scholarly journals FEI Titan 80-300 TEM

2016 ◽  
Vol 2 ◽  
Author(s):  
Andreas Thust ◽  
Juri Barthel ◽  
Karsten Tillmann
Keyword(s):  
Electron Microscope ◽  
Solid State ◽  
Spherical Aberration ◽  
Atomic Scale ◽  
Atomic Resolution ◽  
Lens System ◽  
Stage Design ◽  
Precise Positioning ◽  
Transmission Electron ◽  
Wide Range

The FEI Titan 80-300 TEM is a high-resolution transmission electron microscope equipped with a field emission gun and a corrector for the spherical aberration (<em>C</em><sub>S</sub>) of the imaging lens system. The instrument is designed for the investigation of a wide range of solid state phenomena taking place on the atomic scale, which requires true atomic resolution capabilities. Under optimum optical settings of the image <em>C</em><sub>S</sub>-corrector (CEOS CETCOR) the point-resolution is extended up to the information limit of well below 100 pm with 200 keV and 300 keV electrons. A special piezo-stage design allows ultra-precise positioning of the specimen in all 3 dimensions. Digital images are acquired with a Gatan 2k x 2k slow-scan charged coupled device camera.

Electrostatic Aberration Correction in LV-SEM

2000 ◽  
Vol 6 (S2) ◽  
pp. 746-747 ◽  
Author(s):  
D.J. Maas ◽  
A. Henstra ◽  
M.P.C.M. Krijn ◽  
S.A.M. Mentink
Keyword(s):  
Electron Microscope ◽  
Low Voltage ◽  
State Of The Art ◽  
Spherical Aberration ◽  
Positive Definite ◽  
Ease Of Use ◽  
Objective Lens ◽  
Time Varying ◽  
Voltage Electron ◽  
Aberration Corrected

The resolution of a low-voltage electron microscope is limited by the chromatic and spherical aberration of the objective lens, see Fig. 1. The design of state-of-the-art objective lenses is optimised for minimal aberrations. Any significant improvement of the resolution requires an aberration corrector. Recently, correction of both Cc and Cs has been demonstrated in SEM, using a combination of magnetic and electrostatic quadrupoles and octupoles (Zach and Haider, 1995). The present paper presents an alternative design, which is based on a purely electrostatic concept, potentially simplifying the ease-of-use of an aberration corrected microscope.In 1936 Scherzer showed that the fundamental lens aberrations of round lenses are positive definite, in absence of time-varying fields and/or space charge. Negative lens aberrations, required for the correction of Cc and Cs, can only be obtained using non-round lenses, e.g. quadrupoles and octupoles (Scherzer, 1947).

scholarly journals Atomic-Scale Characterization of Metals and Alloys Using Spherical-Aberration Corrected Scanning Transmission Electron Microscopy

2006 ◽  
Vol 12 (S02) ◽  
pp. 1344-1345
Author(s):  
D Williams ◽  
M Watanabe
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Spherical Aberration ◽  
Atomic Scale ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Scale Characterization ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Future trends in aberration-corrected electron microscopy

2009 ◽  
Vol 367 (1903) ◽  
pp. 3809-3823 ◽  
Author(s):  
Harald H. Rose
Keyword(s):  
Electron Microscope ◽  
Low Voltage ◽  
Spherical Aberration ◽  
Scattered Wave ◽  
Objective Lens ◽  
Phase Plate ◽  
Resolution Limit ◽  
Instrumental Resolution ◽  
Atom Displacement ◽  
Aberration Corrected

The attainable specimen resolution is determined by the instrumental resolution limit d i and by radiation damage. Solid objects such as metals are primarily damaged by atom displacement resulting from knock-on collisions of the incident electrons with the atomic nuclei. The instrumental resolution improves appreciably by means of aberration correction. To achieve atomic resolution at voltages below approximately 100 kV and a large number of equally resolved image points, we propose an achromatic electron–optical aplanat, which is free of chromatic aberration, spherical aberration and total off-axial coma. Its anisotropic component is eliminated either by a dual objective lens consisting of two separate windings with opposite directions of their currents or by skew octopoles employed in the TEAM corrector. We obtain optimum imaging conditions by operating the aberration-corrected electron microscope at voltages below the knock-on threshold for atom displacement and by shifting the phase of the non-scattered wave by π /2 or that of the scattered wave by − π /2. In this negative contrast mode, the phase contrast and the scattering contrast add up with the same sign. The realization of a low-voltage aberration-corrected phase transmission electron microscope for the visualization of radiation-sensitive objects is the aim of the proposed SALVE (Sub-Å Low-Voltage Electron microscope) project. This microscope will employ a coma-free objective lens, an obstruction-free phase plate and a novel corrector compensating for the spherical and chromatic aberrations.

scholarly journals Characterization of Ni-base Superalloys on the Atomic Scale by Atom Probe Tomography and Spherical-Aberration Corrected Analytical Electron Microscopy Techniques

2006 ◽  
Vol 12 (S02) ◽  
pp. 534-535 ◽  
Author(s):  
M Watanabe ◽  
D Saxey ◽  
R Zheng ◽  
D Williams ◽  
S Ringer
Keyword(s):  
Electron Microscopy ◽  
Atom Probe Tomography ◽  
Spherical Aberration ◽  
Analytical Electron Microscopy ◽  
Atom Probe ◽  
Atomic Scale ◽  
Analytical Electron ◽  
Microscopy Techniques ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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