scholarly journals Grazing-incidence X-ray diffraction tomography for characterizing organic thin films

2021 ◽  
Vol 54 (5) ◽  
Author(s):  
Esther H. R. Tsai ◽  
Yu Xia ◽  
Masafumi Fukuto ◽  
Yueh-Lin Loo ◽  
Ruipeng Li
Keyword(s):  
Thin Films ◽  
Organic Thin Films ◽  
Grazing Incidence ◽  
Computational Method ◽  
Diffraction Tomography ◽  
Structure Property ◽  
X Ray Diffraction ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Characterization of thin films is of paramount importance for evaluating material processing outcomes/efficiency as well as establishing structure–property/performance relationships. This article introduces grazing-incidence diffraction tomography (GID tomography), a technique that combines grazing-incidence X-ray scattering and computed tomography to quantitatively determine the dimension and orientation of crystalline domains in thin films without restrictions on the beam coherence, substrate type or film thickness. This computational method extends the capability of synchrotron beamlines by utilizing standard X-ray scattering experiment setups.

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

Grazing-incidence X-ray scattering of lamellar thin films

2019 ◽  
Vol 52 (2) ◽  
pp. 247-251
Author(s):  
Detlef-M. Smilgies
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Small Molecules ◽  
Film Studies ◽  
Grazing Incidence ◽  
Semicrystalline Polymers ◽  
X Ray ◽  
X Ray Scattering ◽  
Incident Plane ◽  
Ray Scattering

Recently, surface and thin-film studies using area detectors have become prevalent. An important class of such systems are lamellar thin films formed by small molecules, liquid crystals or semicrystalline polymers. Frequently, the lamellae align more or less parallel to the substrate. Such structures can be easily discerned by their characteristic X-ray scattering close to the incident plane. This paper describes how such patterns can be simulated, in order to extract morphological information about the thin film.

In-Situ Grazing Incidence Small-Angle X-ray Scattering Studies on Nanopore Evolution in Low-kOrganosilicate Dielectric Thin Films

2005 ◽  
Vol 38 (8) ◽  
pp. 3395-3405 ◽  
Author(s):  
Byeongdu Lee ◽  
Jinhwan Yoon ◽  
Weontae Oh ◽  
Yongtaek Hwang ◽  
Kyuyoung Heo ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
Dielectric Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Energy Dispersive Grazing Incidence X-ray Diffraction Study on Organic Thin Films EpitaxiaHy Grown on Crystalline Substrate

1995 ◽  
Vol 39 ◽  
pp. 659-664 ◽  
Author(s):  
Kenji Ishida ◽  
Akinori Kita ◽  
Kouichi Hayashi ◽  
Toshihisa Horiuchi ◽  
Shoichi Kal ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Film Studies ◽  
Organic Thin Films ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
X Ray ◽  
Structural Evaluation ◽  
Crystalline Substrate ◽  
Scattering Volume

Thin film technology is rapidly evolving today, and the characterization of the thin film and its surface have become very important issue not only from scientific but also technological viewpoints. Although x-ray diffraction measurements have been used as suitable evaluation methods in crystallography studies, its application to the structural evaluation of the thin films, especially organic one having the low electron densities, is not easy due to the small amounts of scattering volume and the high obstructive scattering noise from the substrate. However, the x-ray diffraction measurements under grazing incidence will aid not only in overcoming the such problems but also in analyzing in-plane structure of the thin films. Therefore, so-called grazing incidence x-ray diffraction (GIXD) has been recognized as one of the most powerful tools for the surface and thin film studies.

Synchrotron Grazing Incidence X-ray Scattering Study of the Morphological Structures in Thin Films of a Polymethacrylate Diblock Copolymer Bearing POSS Moieties

2010 ◽  
Vol 114 (24) ◽  
pp. 8033-8042 ◽  
Author(s):  
Sangwoo Jin ◽  
Tomoyasu Hirai ◽  
Byungcheol Ahn ◽  
Yecheol Rho ◽  
Kwang-Woo Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Diblock Copolymer ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Study ◽  
Ray Scattering
Sign in / Sign up

Export Citation Format

Share Document