scholarly journals Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

2019 ◽  
Vol 75 (2) ◽  
pp. 342-351 ◽  
Author(s):  
K. V. Nikolaev ◽  
S. N. Yakunin ◽  
I. A. Makhotkin ◽  
J. de la Rie ◽  
R. V. Medvedev ◽  
...  
Keyword(s):  
Numerical Simulations ◽  
Small Angle ◽  
Average Distance ◽  
Grazing Incidence ◽  
Density Fluctuations ◽  
X Ray ◽  
X Ray Scattering ◽  
Scanning Transmission ◽  
Average Size ◽  
Ray Scattering

A structural characterization of W/Si multilayers using X-ray reflectivity (XRR), scanning transmission electron microscopy (STEM) and grazing-incidence small-angle X-ray scattering (GISAXS) is presented. STEM images revealed lateral, periodic density fluctuations in the Si layers, which were further analysed using GISAXS. Characteristic parameters of the fluctuations such as average distance between neighbouring fluctuations, average size and lateral distribution of their position were obtained by fitting numerical simulations to the measured scattering images, and these parameters are in good agreement with the STEM observations. For the numerical simulations the density fluctuations were approximated as a set of spheroids distributed inside the Si layers as a 3D paracrystal (a lattice of spheroids with short-range ordering but lacking any long-range order). From GISAXS, the density of the material inside the density fluctuations is calculated to be 2.07 g cm−3 which is 89% of the bulk value of the deposited layer (2.33 g cm−3).

scholarly journals Structural characterization using the multiple scattering effects in grazing-incidence small-angle X-ray scattering

2008 ◽  
Vol 41 (1) ◽  
pp. 134-142 ◽  
Author(s):  
Byeongdu Lee ◽  
Chieh-Tsung Lo ◽  
P. Thiyagarajan ◽  
Dong R. Lee ◽  
Zhongwei Niu ◽  
...  
Keyword(s):  
Multiple Scattering ◽  
Small Angle ◽  
Incident Angle ◽  
Average Distance ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Effects ◽  
Multiple Scattering Effects ◽  
Ray Scattering

The multiple scattering effects present in grazing-incidence small-angle X-ray scattering (GISAXS) data and interference between them are addressed theoretically as well as experimentally with measurement of a series of patterns at different incident angles, referred to as `incident-angle-resolved GISAXS' (IAR-GISAXS). X-ray reflectivity (XR), GISAXS and IAR-GISAXS of virus particles on Si-substrate supported-polystyrene films have been measured and all the data have been analyzed with appropriate formalisms. It was found that under certain conditions it is possible to extract the correct structural features of the materials from the GISAXS/IAR-GISAXS data using the kinematic SAXS formalisms, without the need to use the distorted-wave Born approximation. Furthermore, the Kiessig fringes in GISAXS enable the measurement of the average distance between the particle and the substrate, similar to the measurement of film thickness using the fringes in the XR data. It is believed that the methods developed here will expand the application of GISAXS as they enable the application of model-independent and kinematic SAXS theories to nanostructured two-dimensional ordered films.

A general model for estimating the ordering of mesoporous film by grazing incidence small angle X-ray scattering

2014 ◽  
Vol 115 (20) ◽  
pp. 204311 ◽  
Author(s):  
Nie Zhao ◽  
Chunming Yang ◽  
Qian Zhang ◽  
Xueming Lu ◽  
Yuzhu Wang ◽  
...  
Keyword(s):  
Small Angle ◽  
General Model ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Mesoporous Film ◽  
Ray Scattering

Grazing incidence small angle x-ray scattering from free-standing nanostructures

1999 ◽  
Vol 86 (12) ◽  
pp. 6763-6769 ◽  
Author(s):  
Markus Rauscher ◽  
Rogerio Paniago ◽  
Hartmut Metzger ◽  
Zoltan Kovats ◽  
Jan Domke ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
Free Standing ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Thermal quenching sample chamber for grazing incidence small angle x-ray scattering studies of polymer films

2007 ◽  
Vol 78 (11) ◽  
pp. 113910 ◽  
Author(s):  
M. A. Singh ◽  
M. N. Groves ◽  
M. S. Müller ◽  
I. J. Stahlbrand ◽  
D.-M. Smilgies
Keyword(s):  
Polymer Films ◽  
Small Angle ◽  
Thermal Quenching ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Sample Chamber ◽  
Ray Scattering

scholarly journals A grazing incidence small-angle x-ray scattering analysis on capped Ge nanodots in layer structures

2010 ◽  
Vol 22 (47) ◽  
pp. 474003 ◽  
Author(s):  
Hiroshi Okuda ◽  
Masayuki Kato ◽  
Keiji Kuno ◽  
Shojiro Ochiai ◽  
Noritaka Usami ◽  
...  
Keyword(s):  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Layer Structures ◽  
Ray Scattering
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