Identification and evaluation for the dynamic signals caused by pressure fluctuation of aerostatic slider

Purpose To identify the dynamic feature of the aerostatic slider caused by gas film, an evaluation system by a piezoelectric acceleration sensor is presented in time and frequency domain. Design/methodology/approach The dynamic pressure fluctuation is evaluated by the wavelet transform, cross correlation analysis and power spectral density (PSD). Wavelet transform is used to process the measured result of the aerostatic slider and the signal is decomposed into high-frequency and low-frequency signal. Correlation analysis method is used to evaluate the impact of the initial gas gap on the fluctuation in time domain. Findings According to the PSD analysis of the processed signal in the frequency domain, the natural frequency of the aerostatic slider is identified from the measured signal in frequency domain; this method provides a basis for the identification of guideway errors. Research limitations/implications The method can also be applied to the error identification of other components of the machine tool. Originality/value Wavelet transform is used to process the measured result of the aerostatic slider by acceleration sensor, and the signal is decomposed into high-frequency and low-frequency signal. Correlation analysis method is used to evaluate the impact of the initial gas gap on the fluctuation in time domain. According to the PSD analysis of the processed signal in the frequency domain, the natural frequency of the aerostatic slider is identified from the measured signal in frequency domain; this method provides a basis for the identification of slider errors.